Abstract
We have operated 25-100 mu m diameter radio frequency microhollow cathode discharges stably, for many hours, in neon and in argon. Electrical and spectroscopic measurements were used to explore three possible electron heating modes and obtain detail regarding the electron energy distribution. Analysis points to the possibility of pendular electron heating at low voltages. (c) 2008 American Institute of Physics.
Original language | English |
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Pages (from-to) | 011501 |
Journal | Applied Physics Letters |
Volume | 93 |
Issue number | 1 |
DOIs | |
Publication status | Published (in print/issue) - Jul 2008 |