Ultrasmall radio frequency driven microhollow cathode discharge

CMO Mahony, T Gans, WG Graham, PD Maguire, Z Lj Petrovic

Research output: Contribution to journalArticle

33 Citations (Scopus)
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Abstract

We have operated 25-100 mu m diameter radio frequency microhollow cathode discharges stably, for many hours, in neon and in argon. Electrical and spectroscopic measurements were used to explore three possible electron heating modes and obtain detail regarding the electron energy distribution. Analysis points to the possibility of pendular electron heating at low voltages. (c) 2008 American Institute of Physics.
Original languageEnglish
Pages (from-to)011501
JournalApplied Physics Letters
Volume93
Issue number1
DOIs
Publication statusPublished - Jul 2008

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