Ultra-thin tetrahedral amorphous carbon films with strong adhesion, as measured by nanoscratch testing

Engineering

• Tetrahedral Amorphous Carbon 100%
• Strong Adhesion 100%
• Delamination 33%
• Energetics 33%
• Chemical Vapor Deposition 16%
• Vapor Deposition 16%
• Substrate Bias 16%
• Magnetic Recording 16%
• Amorphous Carbon 16%
• Diamond 16%
• Internal Stress 16%
• Slope Ratio 16%
• Critical Load 16%
• Filtered Cathodic Arc 16%
• Hard Layer 16%
• Ion Beam Mixing 16%
• Amorphous Hydrogenated Carbon 16%

Material Science

• Carbon Films 100%
• Tetrahedral Amorphous Carbon 100%
• Film 66%
• Delamination 33%
• Amorphous Carbon 16%
• Plasma-Enhanced Chemical Vapor Deposition 16%
• Scanning Electron Microscopy 16%
• Energy-Dispersive X-Ray Spectroscopy 16%
• Al2O3 16%
• Nanoindentation 16%
• Amorphous Hydrogenated Carbon 16%
• Diamond 16%
• Mechanical Testing 16%