Tuning the flexural frequency of overhang-/T-shaped microcantilevers for high harmonics

Le Tri Dat, Chi Cuong Nguyen, Nguyen Duy Vy, Amir Farokh Payam

Research output: Contribution to journalArticlepeer-review

Abstract

High-harmonic (HH) frequencies in microcantilevers impose several applications in precision detection thanks to the higher sensitivity of the higher modes in comparison to the fundamental modes. In this study, we showed that by tuning the cantilever length by changing the clamped position, the dimensional ratio of the overhang to the main cantilever part is altered and the HHs could be effectively obtained. Multiple HH frequencies have been achieved, from the 4th to 8th order of the second and from the 11th to 26th order of the third-mechanical mode versus the first mode, and these orders are much higher if higher modes are used. The analytical calculation is in agreement with available results of other groups. HH behavior when the cantilever interacts with the sample is also examined and is strongly dependent on the overhang parameters. These results could guide the experimentalist in the tuning and controlling of the HHs in detecting objects.
Original languageEnglish
Article number107002
Pages (from-to)1-7
Number of pages7
JournalJapanese Journal of Applied Physics
Volume62
Issue number10
Early online date30 Oct 2023
DOIs
Publication statusPublished online - 30 Oct 2023

Bibliographical note

Funding Information:
This research was supported by the Ho Chi Minh City Department of Science and Technology of Vietnam, Contract No. 12/2021/HD-QKHCN on Mar. 24th, 2021. Also, this research was supported by the annual projects of The Research Laboratories of Saigon Hi-Tech Park, Management Board of Saigon Hi-Tech Park, Decision No. 17/QD-KCNC on Feb. 1st, 2023 (Project No. 1). N. D. Vy is thankful to the Van Lang University.

Publisher Copyright:
© 2023 The Japan Society of Applied Physics.

Keywords

  • analytical method
  • contact stiffness
  • frequency equation
  • high-harmonic
  • microcantilever
  • tip-sample interaction
  • tunable cantilever length

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