Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

Mark Gorman; Damien Coyle; Xuemei Ding; Liam Maguire; Chao Feng

Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

Mark Gorman
, Damien Coyle
, Xuemei Ding
, Liam Maguire
, Chao Feng

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

121 Downloads (Pure)

Original language	English
Title of host publication	20th European Advanced Process Control and Manufacturing Conference
Subtitle of host publication	APCM Europe
Place of Publication	Toulon
Edition	20th
Publication status	Published (in print/issue) - 5 Apr 2021
Event	20th European advanced process control and manufacturing (apc\|m) Conference - Toulon, France Duration: 30 Mar 2020 → 1 Apr 2020

Conference

Conference	20th European advanced process control and manufacturing (apc\|m) Conference
Country/Territory	France
City	Toulon
Period	30/03/20 → 1/04/20

UN SDGs

This output contributes to the following UN Sustainable Development Goals (SDGs)

SDG 9 Industry, Innovation, and Infrastructure

Keywords

Deep learning
Autoencoder
Time Series
Semiconductor
Manufacturing
Reconstruction Error

Access to Document

APCM_Abstract_2021_Mark_Gorman_Seagate_V2Final published version, 264 KB
APCM_Conference_April_2022_Mark_Gorman_Anomaly_Detection_in_Batch_Semiconductor_Processing_using_1dCAE_with_LocalisFinal published version, 2.63 MB

Cite this

@inproceedings{1c11f25549a44e7392f665630f1ac6ce,

title = "Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution",

keywords = "Deep learning, Autoencoder, Time Series, Semiconductor, Manufacturing, Reconstruction Error",

author = "Mark Gorman and Damien Coyle and Xuemei Ding and Liam Maguire and Chao Feng",

year = "2021",

month = apr,

day = "5",

language = "English",

booktitle = "20th European Advanced Process Control and Manufacturing Conference",

edition = "20th",

note = "20th European advanced process control and manufacturing (apc|m) Conference ; Conference date: 30-03-2020 Through 01-04-2020",

}

Gorman, M, Coyle, D , Ding, X , Maguire, L & Feng, C 2021, Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution. in 20th European Advanced Process Control and Manufacturing Conference: APCM Europe. 20th edn, Toulon, 20th European advanced process control and manufacturing (apc|m) Conference, Toulon, France, 30/03/20.

Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution. / Gorman, Mark; Coyle, Damien ; Ding, Xuemei et al.
20th European Advanced Process Control and Manufacturing Conference: APCM Europe. 20th. ed. Toulon, 2021.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

AU - Gorman, Mark

AU - Coyle, Damien

AU - Ding, Xuemei

AU - Maguire, Liam

AU - Feng, Chao

PY - 2021/4/5

Y1 - 2021/4/5

KW - Deep learning

KW - Autoencoder

KW - Time Series

KW - Semiconductor

KW - Manufacturing

KW - Reconstruction Error

UR - https://clustercollaboration.eu/community-event/20th-european-advanced-process-control-and-manufacturing-apcm-conference

M3 - Conference contribution

BT - 20th European Advanced Process Control and Manufacturing Conference

CY - Toulon

T2 - 20th European advanced process control and manufacturing (apc|m) Conference

Y2 - 30 March 2020 through 1 April 2020

ER -

Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

Conference

UN SDGs

Keywords

Access to Document

Other files and links

Sensor-based anomaly detection deployed at scale in semiconductor manufacturing

Cite this

Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution

Conference

UN SDGs

Keywords

Access to Document

Other files and links

Student theses

Sensor-based anomaly detection deployed at scale in semiconductor manufacturing

Cite this