@inproceedings{1c11f25549a44e7392f665630f1ac6ce,
title = "Time Series Anomaly Detection in Batch Semiconductor Processes using Localised Reconstruction Errors from Semi-Supervised Convolutional AutoEncoders deployed as a Containerised Microservices Edge Solution",
keywords = "Deep learning, Autoencoder, Time Series, Semiconductor, Manufacturing, Reconstruction Error",
author = "Mark Gorman and Damien Coyle and Xuemei Ding and Liam Maguire and Chao Feng",
year = "2021",
month = apr,
day = "5",
language = "English",
booktitle = "20th European Advanced Process Control and Manufacturing Conference",
edition = "20th",
note = "20th European advanced process control and manufacturing (apc|m) Conference ; Conference date: 30-03-2020 Through 01-04-2020",
}