The reactive ion etching of transparent electrodes for flat panel displays using Ar/Cl2 plasmas

J Molloy, P Maguire, SJ Laverty, JA McLaughlin

Research output: Contribution to journal › Article › peer-review

Original language	English
Journal	Journal of the Electrochemical Society
Volume	142
Issue number	12
Publication status	Published (in print/issue) - 1995

Cite this

@article{eb594eee9a1b420986841e2cd8946373,

title = "The reactive ion etching of transparent electrodes for flat panel displays using Ar/Cl2 plasmas",

author = "J Molloy and P Maguire and SJ Laverty and JA McLaughlin",

year = "1995",

language = "English",

volume = "142",

journal = "Journal of the Electrochemical Society",

issn = "1945-7111",

publisher = "Institute of Physics",

number = "12",

}