The reactive ion etching of transparent electrodes for flat panel displays using Ar/Cl2 plasmas

J Molloy, P Maguire, SJ Laverty, JA McLaughlin

Research output: Contribution to journalArticlepeer-review

Original languageEnglish
JournalJournal of the Electrochemical Society
Volume142
Issue number12
Publication statusPublished - 1995

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