The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films

JF Zhao, P Lemoine, ZH Liu, JP Quinn, JAD McLaughlin

Research output: Contribution to journalArticlepeer-review

50 Citations (Scopus)

Fingerprint

Dive into the research topics of 'The effects of Si incorporation on the microstructure and nanomechanical properties of DLC thin films'. Together they form a unique fingerprint.

Chemical Compounds

Engineering & Materials Science

Physics & Astronomy