Abstract
| Language | English |
|---|---|
| Pages | 983-988 |
| Journal | Diamond and Related Materials |
| Volume | 14 |
| Issue number | 3-7, S |
| DOIs | |
| Publication status | Published - Mar 2005 |
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Keywords
- tetrahedral carbon
- thickness
- XRR
- vibrational spectroscopies
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The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films. / McCann, R; Roy, SS; Papakonstantinou, P; Abbas, GA; McLaughlin, JAD.
In: Diamond and Related Materials, Vol. 14, No. 3-7, S, 03.2005, p. 983-988.Research output: Contribution to journal › Article
TY - JOUR
T1 - The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films
AU - McCann, R
AU - Roy, SS
AU - Papakonstantinou, P
AU - Abbas, GA
AU - McLaughlin, JAD
N1 - 15th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides, and Silicon Carbide, Riva del Garda, ITALY, SEP 12-17, 2004
PY - 2005/3
Y1 - 2005/3
N2 - Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.
AB - Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.
KW - tetrahedral carbon
KW - thickness
KW - XRR
KW - vibrational spectroscopies
U2 - 10.1016/j.diamond.2004.12.037
DO - 10.1016/j.diamond.2004.12.037
M3 - Article
VL - 14
SP - 983
EP - 988
JO - Diamond and Related Materials
T2 - Diamond and Related Materials
JF - Diamond and Related Materials
SN - 0925-9635
IS - 3-7, S
ER -