The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films

R McCann, SS Roy, P Papakonstantinou, GA Abbas, JAD McLaughlin

Research output: Contribution to journalArticle

20 Citations (Scopus)

Abstract

Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.
LanguageEnglish
Pages983-988
JournalDiamond and Related Materials
Volume14
Issue number3-7, S
DOIs
Publication statusPublished - Mar 2005

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Structural properties
Vacuum
Film thickness
Experiments

Keywords

  • tetrahedral carbon
  • thickness
  • XRR
  • vibrational spectroscopies

Cite this

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title = "The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films",
abstract = "Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.",
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The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films. / McCann, R; Roy, SS; Papakonstantinou, P; Abbas, GA; McLaughlin, JAD.

In: Diamond and Related Materials, Vol. 14, No. 3-7, S, 03.2005, p. 983-988.

Research output: Contribution to journalArticle

TY - JOUR

T1 - The effect of thickness and arc current on the structural properties of FCVA synthesised ta-C and ta-C : N films

AU - McCann, R

AU - Roy, SS

AU - Papakonstantinou, P

AU - Abbas, GA

AU - McLaughlin, JAD

N1 - 15th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides, and Silicon Carbide, Riva del Garda, ITALY, SEP 12-17, 2004

PY - 2005/3

Y1 - 2005/3

N2 - Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.

AB - Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.

KW - tetrahedral carbon

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KW - XRR

KW - vibrational spectroscopies

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