Abstract
Two sets of experiments were carried out for both ta-C and ta-C:N films prepared by filtered cathodic vacuum arc deposition (FCVA). For the first experiment films were prepared as a function of arc current ranging from 30 to 100 A with a film thickness of approximately 70 nm. In the second experiment a series of films was prepared as a function of thickness ranging from 30 to 100 run at 80 A arc current. Raman studies showed that for ta-C and ta-C:N films, an arc current of 100 A produced films with the lowest sp(2) configurations as well as the highest density values. The effect of thickness on ta-C and ta-C:N films revealed different trends. Raman and XRR analysis identified a decrease in sp(2) content and an increase in density as film thickness was increased for ta-C films. However ta-C:N films exceeding 70 nm showed an increasing trend in sp(2) content whilst a significant dropin density was observed. (c) 2005 Published by Elsevier B.V.
Original language | English |
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Pages (from-to) | 983-988 |
Journal | Diamond and Related Materials |
Volume | 14 |
Issue number | 3-7, S |
DOIs | |
Publication status | Published (in print/issue) - Mar 2005 |
Bibliographical note
15th European Conference on Diamond, Diamond-Like Materials, Carbon Nanotubes, Nitrides, and Silicon Carbide, Riva del Garda, ITALY, SEP12-17, 2004
Keywords
- tetrahedral carbon
- thickness
- XRR
- vibrational spectroscopies