The Detection of Empty Resist Bottles or Air in the Resist Lines of a Photolithography Coating Tool

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Original language	English
Pages (from-to)	881-892
Journal	International Journal of Computer Integrated Manufacturing
Volume	28
Issue number	4
DOIs	https://doi.org/10.1080/0951192X.2014.933487
Publication status	Published (in print/issue) - 1 Dec 2014

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title = "The Detection of Empty Resist Bottles or Air in the Resist Lines of a Photolithography Coating Tool",

author = "T Sweeney and K Curran",

year = "2014",

month = dec,

day = "1",

doi = "10.1080/0951192X.2014.933487",

language = "English",

volume = "28",

pages = "881--892",

journal = "International Journal of Computer Integrated Manufacturing",

issn = "1362-3052",

publisher = "Taylor & Francis",

number = "4",

}

TY - JOUR

T1 - The Detection of Empty Resist Bottles or Air in the Resist Lines of a Photolithography Coating Tool

AU - Sweeney, T

AU - Curran, K

PY - 2014/12/1

Y1 - 2014/12/1

U2 - 10.1080/0951192X.2014.933487

DO - 10.1080/0951192X.2014.933487

M3 - Article

SN - 1362-3052

VL - 28

SP - 881

EP - 892

JO - International Journal of Computer Integrated Manufacturing

JF - International Journal of Computer Integrated Manufacturing

IS - 4

ER -