The Detection of Empty Resist Bottles or Air in the Resist Lines of a Photolithography Coating Tool

T Sweeney, K Curran

Research output: Contribution to journalArticle

LanguageEnglish
Pages881-892
JournalInternational Journal of Computer Integrated Manufacturing
Volume28
Issue number4
DOIs
Publication statusPublished - 1 Dec 2014

Cite this

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title = "The Detection of Empty Resist Bottles or Air in the Resist Lines of a Photolithography Coating Tool",
author = "T Sweeney and K Curran",
year = "2014",
month = "12",
day = "1",
doi = "10.1080/0951192X.2014.933487",
language = "English",
volume = "28",
pages = "881--892",
journal = "International Journal of Computer Integrated Manufacturing",
issn = "0951-192X",
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}

TY - JOUR

T1 - The Detection of Empty Resist Bottles or Air in the Resist Lines of a Photolithography Coating Tool

AU - Sweeney, T

AU - Curran, K

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Y1 - 2014/12/1

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JF - International Journal of Computer Integrated Manufacturing

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