An innovative approach to fabricate tailored Mo-oxide nanostructures and composite nanoarchitectures using atmospheric microplasmas sustained in a gap between a Mo wire and a Si substrate is reported. It is shown that at smaller gap distances spherical nanoparticles are produced whereas sheet-like structures emerge when the gap is increased. When the wire is consumed continuously, it is possible to synthesize complex nanoarchitectures made of nanoparticles decorated with nanosheets. These processes can be applied for other metal and metal oxide materials and suggest a way to improve control and predictability, common problems in high-yield nanofabrication.
Mariotti, D., & Ostrikov, K. (2009). Tailoring microplasma nanofabrication: from nanostructures to nanoarchitectures. JOURNAL OF PHYSICS D-APPLIED PHYSICS, 42(9), 092002-1. https://doi.org/10.1088/0022-3727/42/9/09/2002