@inproceedings{660dc0b1f5e44b9bb1b78a0b6010d4dd,
title = "Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis",
abstract = "The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.",
author = "P Lemoine and JAD McLaughlin",
note = "1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97), CAMBRIDGE, ENGLAND, SEP 02-05, 1997; ELECTRON MICROSCOPY AND ANALYSIS 1997 ; Conference date: 01-01-1997",
year = "1997",
language = "English",
series = "INSTITUTE OF PHYSICS CONFERENCE SERIES",
publisher = "Institute of Physics",
pages = "585--588",
editor = "JM Rodenburg",
booktitle = "Unknown Host Publication",
address = "United Kingdom",
}