Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.
LanguageEnglish
Title of host publicationUnknown Host Publication
EditorsJM Rodenburg
Place of PublicationTECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX
Pages585-588
Number of pages4
Publication statusPublished - 1997
EventELECTRON MICROSCOPY AND ANALYSIS 1997 -
Duration: 1 Jan 1997 → …

Publication series

NameINSTITUTE OF PHYSICS CONFERENCE SERIES
PublisherIOP PUBLISHING LTD

Conference

ConferenceELECTRON MICROSCOPY AND ANALYSIS 1997
Period1/01/97 → …

Fingerprint

low voltage
energy dissipation
diamonds
electron energy
coatings
scanning electron microscopy
carbon
estimates
electrons

Cite this

Lemoine, P., & McLaughlin, JAD. (1997). Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. In JM. Rodenburg (Ed.), Unknown Host Publication (pp. 585-588). (INSTITUTE OF PHYSICS CONFERENCE SERIES). TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX.
Lemoine, P ; McLaughlin, JAD. / Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. Unknown Host Publication. editor / JM Rodenburg. TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX, 1997. pp. 585-588 (INSTITUTE OF PHYSICS CONFERENCE SERIES).
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title = "Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis",
abstract = "The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.",
author = "P Lemoine and JAD McLaughlin",
note = "1997 Biennial Meeting of the Electron-Microscopy-and-Analysis-Group of the Institute-of-Physics (EMAG 97), CAMBRIDGE, ENGLAND, SEP 02-05, 1997",
year = "1997",
language = "English",
series = "INSTITUTE OF PHYSICS CONFERENCE SERIES",
publisher = "IOP PUBLISHING LTD",
pages = "585--588",
editor = "JM Rodenburg",
booktitle = "Unknown Host Publication",

}

Lemoine, P & McLaughlin, JAD 1997, Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. in JM Rodenburg (ed.), Unknown Host Publication. INSTITUTE OF PHYSICS CONFERENCE SERIES, TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX, pp. 585-588, ELECTRON MICROSCOPY AND ANALYSIS 1997, 1/01/97.

Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. / Lemoine, P; McLaughlin, JAD.

Unknown Host Publication. ed. / JM Rodenburg. TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX, 1997. p. 585-588 (INSTITUTE OF PHYSICS CONFERENCE SERIES).

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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T1 - Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis

AU - Lemoine, P

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N2 - The intensity of EDX peaks fi-om substrate elements is used to measure the thickness of ultrathin DLC films. It also provide an electron energy loss estimate useful for optimising secondary electron images.

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M3 - Conference contribution

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BT - Unknown Host Publication

A2 - Rodenburg, JM

CY - TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX

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Lemoine P, McLaughlin JAD. Surface characterisation of ultrathin diamond-like carbon coatings by low voltage SEM/EDX analysis. In Rodenburg JM, editor, Unknown Host Publication. TECHNO HOUSE, REDCLIFFE WAY, BRISTOL, ENGLAND BS1 6NX. 1997. p. 585-588. (INSTITUTE OF PHYSICS CONFERENCE SERIES).