Single-crystal micromachining using multiple fusion-bonded layers

A Brown, G O'Neill, S Blackstone

Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

4 Citations (Scopus)


Multi-layer structures have been fabricated using Fusion bonding. The paper shows void free layers of between 2 and 100 microns that have been bonded to form multi-layer structures. Silicon layers have been bonded both with and without interfacial oxide layers
Original languageEnglish
Title of host publicationUnknown Host Publication
Number of pages10
Publication statusPublished (in print/issue) - 1 Aug 2003
EventMicromachining and Microfabrication Process Technology VI - Santa Clara
Duration: 1 Aug 2003 → …


ConferenceMicromachining and Microfabrication Process Technology VI
Period1/08/03 → …


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