Single-crystal micromachining using multiple fusion-bonded layers

A Brown, G O'Neill, S Blackstone

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Multi-layer structures have been fabricated using Fusion bonding. The paper shows void free layers of between 2 and 100 microns that have been bonded to form multi-layer structures. Silicon layers have been bonded both with and without interfacial oxide layers
Original languageEnglish
Title of host publicationUnknown Host Publication
Pages406-415
Number of pages10
DOIs
Publication statusPublished - 1 Aug 2003
EventMicromachining and Microfabrication Process Technology VI - Santa Clara
Duration: 1 Aug 2003 → …

Conference

ConferenceMicromachining and Microfabrication Process Technology VI
Period1/08/03 → …

    Fingerprint

Cite this

Brown, A., O'Neill, G., & Blackstone, S. (2003). Single-crystal micromachining using multiple fusion-bonded layers. In Unknown Host Publication (pp. 406-415) https://doi.org/10.1117/12.396460