Single-crystal micromachining using multiple fusion-bonded layers

A Brown, G O'Neill, S Blackstone

Research output: Chapter in Book/Report/Conference proceedingConference contribution

4 Citations (Scopus)

Abstract

Multi-layer structures have been fabricated using Fusion bonding. The paper shows void free layers of between 2 and 100 microns that have been bonded to form multi-layer structures. Silicon layers have been bonded both with and without interfacial oxide layers
LanguageEnglish
Title of host publicationUnknown Host Publication
Pages406-415
Number of pages10
DOIs
Publication statusPublished - 1 Aug 2003
EventMicromachining and Microfabrication Process Technology VI - Santa Clara
Duration: 1 Aug 2003 → …

Conference

ConferenceMicromachining and Microfabrication Process Technology VI
Period1/08/03 → …

Fingerprint

micromachining
fusion
laminates
single crystals
voids
oxides
silicon

Cite this

Brown, A., O'Neill, G., & Blackstone, S. (2003). Single-crystal micromachining using multiple fusion-bonded layers. In Unknown Host Publication (pp. 406-415) https://doi.org/10.1117/12.396460
Brown, A ; O'Neill, G ; Blackstone, S. / Single-crystal micromachining using multiple fusion-bonded layers. Unknown Host Publication. 2003. pp. 406-415
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Brown, A, O'Neill, G & Blackstone, S 2003, Single-crystal micromachining using multiple fusion-bonded layers. in Unknown Host Publication. pp. 406-415, Micromachining and Microfabrication Process Technology VI, 1/08/03. https://doi.org/10.1117/12.396460

Single-crystal micromachining using multiple fusion-bonded layers. / Brown, A; O'Neill, G; Blackstone, S.

Unknown Host Publication. 2003. p. 406-415.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

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AB - Multi-layer structures have been fabricated using Fusion bonding. The paper shows void free layers of between 2 and 100 microns that have been bonded to form multi-layer structures. Silicon layers have been bonded both with and without interfacial oxide layers

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Brown A, O'Neill G, Blackstone S. Single-crystal micromachining using multiple fusion-bonded layers. In Unknown Host Publication. 2003. p. 406-415 https://doi.org/10.1117/12.396460