Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL

Nikhil Bhalla, S.S. Li, Danny Wen Yaw Chung

Research output: Contribution to conferencePaper

Abstract

The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure. There is an elongation or shortening of suspension beam when the support frame moves relative to proof mass. The simulations show the von Mises stress, displacement, Eigen frequency plot, voltage distribution and conductivity change in the piezoresistors using COMSOL 3.5a.

Conference

ConferenceCOMSOL-International Conference
CountryUnited States
CityBoston
Period15/10/11 → …

Fingerprint

Accelerometers
MEMS
Elongation
Electric potential

Cite this

Bhalla, N., Li, S. S., & Chung, D. W. Y. (2011). Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL. Paper presented at COMSOL-International Conference, Boston, United States.
Bhalla, Nikhil ; Li, S.S. ; Chung, Danny Wen Yaw. / Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL. Paper presented at COMSOL-International Conference, Boston, United States.
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title = "Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL",
abstract = "The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure. There is an elongation or shortening of suspension beam when the support frame moves relative to proof mass. The simulations show the von Mises stress, displacement, Eigen frequency plot, voltage distribution and conductivity change in the piezoresistors using COMSOL 3.5a.",
author = "Nikhil Bhalla and S.S. Li and Chung, {Danny Wen Yaw}",
year = "2011",
language = "English",
note = "COMSOL-International Conference ; Conference date: 15-10-2011",

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Bhalla, N, Li, SS & Chung, DWY 2011, 'Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL' Paper presented at COMSOL-International Conference, Boston, United States, 15/10/11, .

Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL. / Bhalla, Nikhil; Li, S.S.; Chung, Danny Wen Yaw.

2011. Paper presented at COMSOL-International Conference, Boston, United States.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL

AU - Bhalla, Nikhil

AU - Li, S.S.

AU - Chung, Danny Wen Yaw

PY - 2011

Y1 - 2011

N2 - The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure. There is an elongation or shortening of suspension beam when the support frame moves relative to proof mass. The simulations show the von Mises stress, displacement, Eigen frequency plot, voltage distribution and conductivity change in the piezoresistors using COMSOL 3.5a.

AB - The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure. There is an elongation or shortening of suspension beam when the support frame moves relative to proof mass. The simulations show the von Mises stress, displacement, Eigen frequency plot, voltage distribution and conductivity change in the piezoresistors using COMSOL 3.5a.

M3 - Paper

ER -

Bhalla N, Li SS, Chung DWY. Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL. 2011. Paper presented at COMSOL-International Conference, Boston, United States.