The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure. There is an elongation or shortening of suspension beam when the support frame moves relative to proof mass. The simulations show the von Mises stress, displacement, Eigen frequency plot, voltage distribution and conductivity change in the piezoresistors using COMSOL 3.5a.
|Publication status||Published (in print/issue) - 2011|
|Event||COMSOL-International Conference - Boston, United States|
Duration: 15 Oct 2011 → …
|Period||15/10/11 → …|