Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL

Nikhil Bhalla, S.S. Li, Danny Wen Yaw Chung

Research output: Contribution to conferencePaper

Abstract

The investigation in this paper involves simulations of piezoresistive accelerometer system. The piezoresistive accelerometer is made up of square shaped proof mass with flexures supporting it. The piezoresistors are placed near the proof mass and frame ends of the flexure. There is an elongation or shortening of suspension beam when the support frame moves relative to proof mass. The simulations show the von Mises stress, displacement, Eigen frequency plot, voltage distribution and conductivity change in the piezoresistors using COMSOL 3.5a.
Original languageEnglish
Publication statusPublished - 2011
EventCOMSOL-International Conference - Boston, United States
Duration: 15 Oct 2011 → …

Conference

ConferenceCOMSOL-International Conference
CountryUnited States
CityBoston
Period15/10/11 → …

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  • Cite this

    Bhalla, N., Li, S. S., & Chung, D. W. Y. (2011). Simulations of MEMS based Piezoresistive Accelerometer Design in COMSOL. Paper presented at COMSOL-International Conference, Boston, United States.