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Dive into the research topics of 'Simulation and fabrication of HF microelectromechanical bandpass filter'. Together they form a unique fingerprint.
Chemical Compounds
Bandpass filters
Bandwidth
Capacitance
Electric potential
Electrodes
Experiments
Fabrication
Membranes
Metals
Oxide semiconductors
Resonators
Silicon Dioxide
Wet etching
Engineering & Materials Science
Bandpass filters
Bandwidth
Capacitance
Electric potential
Electrodes
Experiments
Fabrication
Membranes
Metals
Oxide semiconductors
Resonators
Silica
Wet etching
Physics & Astronomy
bandpass filters
bandwidth
capacitance
CMOS
electric potential
electrodes
etching
fabrication
filters
membranes
output
resonators
silicon dioxide
simulation