Simulation and fabrication of HF microelectromechanical bandpass filter

Engineering & Materials Science

• Bandpass filters 90%
• Resonators 83%
• Capacitance 76%
• Membranes 74%
• Fabrication 65%
• Wet etching 61%
• Oxide semiconductors 52%
• Electric potential 45%
• Silica 45%
• Electrodes 34%
• Metals 28%
• Bandwidth 27%
• Experiments 15%

Physics & Astronomy

• bandpass filters 100%
• filters 63%
• fabrication 53%
• simulation 33%
• capacitance 28%
• resonators 26%
• membranes 26%
• electric potential 19%
• CMOS 15%
• silicon dioxide 13%
• etching 13%
• bandwidth 12%
• electrodes 11%
• output 10%

Chemistry

• Voltage 64%
• Simulation 56%
• Silicon Dioxide 54%
• Etching 40%
• Metal Oxide 36%
• Semiconductor 33%
• Behavior as Electrode 22%