Retarding field energy analyser ion current calibration and transmission

K Denieffe, CMO Mahony, PD Maguire, D Gahan, M B Hopkins

Research output: Contribution to journalArticle

9 Citations (Scopus)

Abstract

Accurate measurement of ion current density and ion energy distributions (IEDs) is oftencritical for plasma processes in both industrial and research settings. Retarding field energyanalysers (RFEAs) have been used to measure IEDs because they are considered accurate,relatively simple and cost effective. However, their usage for critical measurement of ioncurrent density is less common due to difficulties in estimating the proportion of incident ioncurrent reaching the current collector through the RFEA retarding grids. In this paper anRFEA has been calibrated to measure ion current density from an ion beam at pressuresranging from 0.5 to 50.0mTorr. A unique method is presented where the currents generated ateach of the retarding grids and the RFEA upper face are measured separately, allowing thereduction in ion current to be monitored and accounted for at each stage of ion transit to thecollector. From these I–V measurements a physical model is described. Subsequently, amathematical description is extracted which includes parameters to account for gridtransmissions, upper face secondary electron emission and collisionality. Pressure-dependentcalibration factors can be calculated from least mean square best fits of the collector current tothe model allowing quantitative measurement of ion current density.
LanguageEnglish
JournalJournal of Physics D: Applied Physics
Volume44
Issue number075205
DOIs
Publication statusPublished - 2 Feb 2011

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ion currents
retarding
Calibration
Ions
current density
accumulators
Current density
energy distribution
grids
energy
ions
secondary emission
electron emission
proportion
Electron emission
estimating
ion beams
costs
Ion beams
Plasmas

Cite this

Denieffe, K ; Mahony, CMO ; Maguire, PD ; Gahan, D ; Hopkins, M B. / Retarding field energy analyser ion current calibration and transmission. In: Journal of Physics D: Applied Physics. 2011 ; Vol. 44, No. 075205.
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Retarding field energy analyser ion current calibration and transmission. / Denieffe, K; Mahony, CMO; Maguire, PD; Gahan, D; Hopkins, M B.

In: Journal of Physics D: Applied Physics, Vol. 44, No. 075205, 02.02.2011.

Research output: Contribution to journalArticle

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T1 - Retarding field energy analyser ion current calibration and transmission

AU - Denieffe, K

AU - Mahony, CMO

AU - Maguire, PD

AU - Gahan, D

AU - Hopkins, M B

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AB - Accurate measurement of ion current density and ion energy distributions (IEDs) is oftencritical for plasma processes in both industrial and research settings. Retarding field energyanalysers (RFEAs) have been used to measure IEDs because they are considered accurate,relatively simple and cost effective. However, their usage for critical measurement of ioncurrent density is less common due to difficulties in estimating the proportion of incident ioncurrent reaching the current collector through the RFEA retarding grids. In this paper anRFEA has been calibrated to measure ion current density from an ion beam at pressuresranging from 0.5 to 50.0mTorr. A unique method is presented where the currents generated ateach of the retarding grids and the RFEA upper face are measured separately, allowing thereduction in ion current to be monitored and accounted for at each stage of ion transit to thecollector. From these I–V measurements a physical model is described. Subsequently, amathematical description is extracted which includes parameters to account for gridtransmissions, upper face secondary electron emission and collisionality. Pressure-dependentcalibration factors can be calculated from least mean square best fits of the collector current tothe model allowing quantitative measurement of ion current density.

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