@article{8101fadd7f5e4c1c9d31c38e0c9f6ffc,
title = "Quantitative evaluation of local charge trapping in dielectric stacked gate structures using Kelvin probe force microscopy",
author = "G Lubarsky and R Shikler and N Ashkenasy and Y Rosenwaks",
year = "2002",
doi = "10.1116/1.1502701",
language = "English",
volume = "20",
pages = "1914",
journal = "Journal of Vacuum Science \& Technology B: Microelectronics and Nanometer Structures",
publisher = "AVS Science and Technology Society",
number = "5",
}