Quantitative evaluation of local charge trapping in dielectric stacked gate structures using Kelvin probe force microscopy

G Lubarsky, R Shikler, N Ashkenasy, Y Rosenwaks

Research output: Contribution to journalArticle

14 Citations (Scopus)
Original languageEnglish
Pages (from-to)1914
JournalJournal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume20
Issue number5
DOIs
Publication statusPublished - 2002

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