Quantitative evaluation of local charge trapping in dielectric stacked gate structures using Kelvin probe force microscopy

G Lubarsky, R Shikler, N Ashkenasy, Y Rosenwaks

Research output: Contribution to journal › Article › peer-review

16 Citations (Scopus)

Original language	English
Pages (from-to)	1914
Journal	Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
Volume	20
Issue number	5
DOIs	https://doi.org/10.1116/1.1502701
Publication status	Published (in print/issue) - 2002

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AU - Shikler, R

AU - Ashkenasy, N

AU - Rosenwaks, Y

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