Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications

Morris Ming Wei Chang, Milton T.M. Deng, James T.J. Gwo, John D. Mai, Elmer Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.

Original languageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages61-65
Number of pages5
DOIs
Publication statusPublished - 1 Dec 2006
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
CountryChina
CityZhuhai
Period18/01/0621/01/06

Keywords

  • Capacitve
  • Polymer
  • Transducer
  • Ultrasonic

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    Chang, M. M. W., Deng, M. T. M., Gwo, J. T. J., Mai, J. D., & Hsu, E. (2006). Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 61-65). [4134904] https://doi.org/10.1109/NEMS.2006.334622