The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.
|Title of host publication||Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS|
|Number of pages||5|
|Publication status||Published - 1 Dec 2006|
|Event||1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China|
Duration: 18 Jan 2006 → 21 Jan 2006
|Conference||1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS|
|Period||18/01/06 → 21/01/06|