Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications

Morris Ming Wei Chang, Milton T.M. Deng, James T.J. Gwo, John D. Mai, Elmer Hsu

Research output: Chapter in Book/Report/Conference proceedingConference contribution

11 Citations (Scopus)

Abstract

The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.

LanguageEnglish
Title of host publicationProceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages61-65
Number of pages5
DOIs
Publication statusPublished - 1 Dec 2006
Event1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China
Duration: 18 Jan 200621 Jan 2006

Conference

Conference1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
CountryChina
CityZhuhai
Period18/01/0621/01/06

Fingerprint

Ultrasonic transducers
Transducers
Ultrasonics
Polymers
Membranes
Imaging techniques
Fabrication
Silicon nitride
Polysilicon
Nitrides
MATLAB
Guidelines
Temperature
Electric potential

Keywords

  • Capacitve
  • Polymer
  • Transducer
  • Ultrasonic

Cite this

Chang, M. M. W., Deng, M. T. M., Gwo, J. T. J., Mai, J. D., & Hsu, E. (2006). Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 61-65). [4134904] https://doi.org/10.1109/NEMS.2006.334622
Chang, Morris Ming Wei ; Deng, Milton T.M. ; Gwo, James T.J. ; Mai, John D. ; Hsu, Elmer. / Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. pp. 61-65
@inproceedings{2790888fb53d4a51aabbe7f8e4eb2515,
title = "Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications",
abstract = "The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28{\%} and the receiver sensitivity by 33{\%}, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67{\%}, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.",
keywords = "Capacitve, Polymer, Transducer, Ultrasonic",
author = "Chang, {Morris Ming Wei} and Deng, {Milton T.M.} and Gwo, {James T.J.} and Mai, {John D.} and Elmer Hsu",
year = "2006",
month = "12",
day = "1",
doi = "10.1109/NEMS.2006.334622",
language = "English",
isbn = "1424401402",
pages = "61--65",
booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

}

Chang, MMW, Deng, MTM, Gwo, JTJ, Mai, JD & Hsu, E 2006, Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4134904, pp. 61-65, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 18/01/06. https://doi.org/10.1109/NEMS.2006.334622

Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. / Chang, Morris Ming Wei; Deng, Milton T.M.; Gwo, James T.J.; Mai, John D.; Hsu, Elmer.

Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 61-65 4134904.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications

AU - Chang, Morris Ming Wei

AU - Deng, Milton T.M.

AU - Gwo, James T.J.

AU - Mai, John D.

AU - Hsu, Elmer

PY - 2006/12/1

Y1 - 2006/12/1

N2 - The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.

AB - The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.

KW - Capacitve

KW - Polymer

KW - Transducer

KW - Ultrasonic

UR - http://www.scopus.com/inward/record.url?scp=46149120577&partnerID=8YFLogxK

U2 - 10.1109/NEMS.2006.334622

DO - 10.1109/NEMS.2006.334622

M3 - Conference contribution

SN - 1424401402

SN - 9781424401406

SP - 61

EP - 65

BT - Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS

ER -

Chang MMW, Deng MTM, Gwo JTJ, Mai JD, Hsu E. Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 61-65. 4134904 https://doi.org/10.1109/NEMS.2006.334622