Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications

Morris Ming Wei Chang; Milton T.M. Deng; James T.J. Gwo; John D. Mai; Elmer Hsu

doi:10.1109/NEMS.2006.334622

Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications

Morris Ming Wei Chang, Milton T.M. Deng, James T.J. Gwo, John D. Mai, Elmer Hsu

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

14 Citations (Scopus)

Abstract

The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.

Original language	English
Title of host publication	Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Pages	61-65
Number of pages	5
DOIs	https://doi.org/10.1109/NEMS.2006.334622
Publication status	Published (in print/issue) - 1 Dec 2006
Event	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS - Zhuhai, China Duration: 18 Jan 2006 → 21 Jan 2006

Conference

Conference	1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS
Country/Territory	China
City	Zhuhai
Period	18/01/06 → 21/01/06

Keywords

Capacitve
Polymer
Transducer
Ultrasonic

Access to Document

10.1109/NEMS.2006.334622

Cite this

Chang, M. M. W., Deng, M. T. M., Gwo, J. T. J., Mai, J. D., & Hsu, E. (2006). Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. In Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS (pp. 61-65). Article 4134904 https://doi.org/10.1109/NEMS.2006.334622

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title = "Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications",

abstract = "The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.",

keywords = "Capacitve, Polymer, Transducer, Ultrasonic",

author = "Chang, {Morris Ming Wei} and Deng, {Milton T.M.} and Gwo, {James T.J.} and Mai, {John D.} and Elmer Hsu",

year = "2006",

month = dec,

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doi = "10.1109/NEMS.2006.334622",

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isbn = "1424401402",

pages = "61--65",

booktitle = "Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS",

note = "1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS ; Conference date: 18-01-2006 Through 21-01-2006",

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Chang, MMW, Deng, MTM, Gwo, JTJ, Mai, JD & Hsu, E 2006, Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. in Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS., 4134904, pp. 61-65, 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS, Zhuhai, China, 18/01/06. https://doi.org/10.1109/NEMS.2006.334622

Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications. / Chang, Morris Ming Wei; Deng, Milton T.M.; Gwo, James T.J. et al.
Proceedings of 1st IEEE International Conference on Nano Micro Engineered and Molecular Systems, 1st IEEE-NEMS. 2006. p. 61-65 4134904.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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AU - Hsu, Elmer

PY - 2006/12/1

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N2 - The design, simulation, and fabrication results for a first generation polymer CMUT are presented. Baseline ANSYS and MATLAB simulations show that the use of a silicon nitride membrane should increase the transmission signal by 28% and the receiver sensitivity by 33%, when compared to a conventional polysilicon membrane. Simulations with a polymer membrane showed a maximum membrane deflection increase up to 67%, at approximately 6.5 MHz, when compared to nitride. Furthermore, the optimal mechanical impendence coupling frequency was lowered to 3.7 MHz for the polymer. These simulations give design guidelines for a CMUT based on geometric parameters such as membrane length and thickness. A CMUT array was then designed and fabricated with a target DC actuation voltage of less than 50V. Also, results showed potential operation of the CMUT up to 10 MHz using a low temperature fabrication process that still results in durable operation.

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Polymer-based capacitive micromachined ultrasonic transducers (CMUT) for micro surgical imaging applications

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