Plasma-enabled, catalyst-free growth of carbon nanotubes on mechanically-written Si features with arbitrary shape

S Kumar, I Levchenko, K Ostrikov, JAD McLaughlin

Research output: Contribution to journalArticle

34 Citations (Scopus)

Abstract

Simple, rapid, catalyst-free synthesis of complex patterns of long, vertically aligned multiwalled carbon nanotubes, strictly confined within mechanically-written features on a Si(1 0 0) surface is reported. It is shown that dense arrays of the nanotubes can nucleate and fully fill the features when the low-temperature microwave plasma is in a direct contact with the surface. This eliminates additional nanofabrication steps and inevitable contact losses in applications associated with carbon nanotube patterns. © 2011 Elsevier Ltd. All rights reserved
Original languageEnglish
Pages (from-to)325
JournalCarbon
Volume50
Issue number1
DOIs
Publication statusPublished - 2012

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