Plasma-driven self-organization of Ni nanodot arrays on Si(100)

I. Levchenko, K. Ostrikov, K. Diwan, K. Winkler, D Mariotti

    Research output: Contribution to journalArticlepeer-review

    52 Citations (Scopus)


    The results of the combined experimental and numerical study suggest that onequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of variousmaterials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.
    Original languageEnglish
    Pages (from-to)183102-1
    JournalApplied Physics Letters
    Issue number18
    Early online date3 Nov 2008
    Publication statusPublished online - 3 Nov 2008


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