Plasma-driven self-organization of Ni nanodot arrays on Si(100)

I. Levchenko, K. Ostrikov, K. Diwan, K. Winkler, D Mariotti

    Research output: Contribution to journalArticle

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    Abstract

    The results of the combined experimental and numerical study suggest that onequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of variousmaterials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.
    LanguageEnglish
    Pages183102-1
    JournalApplied Physics Letters
    Volume93
    Issue number18
    Early online date3 Nov 2008
    DOIs
    Publication statusE-pub ahead of print - 3 Nov 2008

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    neutral gases
    nickel
    nanoparticles

    Cite this

    Levchenko, I. ; Ostrikov, K. ; Diwan, K. ; Winkler, K. ; Mariotti, D. / Plasma-driven self-organization of Ni nanodot arrays on Si(100). In: Applied Physics Letters. 2008 ; Vol. 93, No. 18. pp. 183102-1.
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    abstract = "The results of the combined experimental and numerical study suggest that onequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of variousmaterials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.",
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    Levchenko, I, Ostrikov, K, Diwan, K, Winkler, K & Mariotti, D 2008, 'Plasma-driven self-organization of Ni nanodot arrays on Si(100)', Applied Physics Letters, vol. 93, no. 18, pp. 183102-1. https://doi.org/10.1063/1.3012572

    Plasma-driven self-organization of Ni nanodot arrays on Si(100). / Levchenko, I.; Ostrikov, K.; Diwan, K.; Winkler, K.; Mariotti, D.

    In: Applied Physics Letters, Vol. 93, No. 18, 03.11.2008, p. 183102-1.

    Research output: Contribution to journalArticle

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    AU - Levchenko, I.

    AU - Ostrikov, K.

    AU - Diwan, K.

    AU - Winkler, K.

    AU - Mariotti, D

    PY - 2008/11/3

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    N2 - The results of the combined experimental and numerical study suggest that onequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of variousmaterials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.

    AB - The results of the combined experimental and numerical study suggest that onequilibrium plasma-driven self-organization leads to better size and positional uniformity of nickel nanodot arrays on a Si(100) surface compared with neutral gas-based processes under similar conditions. This phenomenon is explained by introducing the absorption zone patterns, whose areas relative to the small nanodot sizes become larger when the surface is charged. Our results suggest that strongly nonequilibrium and higher-complexity plasma systems can be used to improve ordering and size uniformity in nanodot arrays of variousmaterials, a common and seemingly irresolvable problem in self-organized systems of small nanoparticles.

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