Photoablative etching of polymers for integrated optoelectronic devices

P. Lemoine, J.d. Magan, W. Blau

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	447-450
Journal	Microelectronic Engineering
Volume	13
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(91)90130-6
Publication status	Published (in print/issue) - 1 Mar 1991

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title = "Photoablative etching of polymers for integrated optoelectronic devices",

author = "P. Lemoine and J.d. Magan and W. Blau",

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AU - Magan, J.d.

AU - Blau, W.

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