Photoablative etching of polymers for integrated optoelectronic devices

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	447-450
Journal	Microelectronic Engineering
Volume	13
Issue number	1-4
DOIs	https://doi.org/10.1016/0167-9317(91)90130-6
Publication status	Published (in print/issue) - 1 Mar 1991

Access to Document

@article{48ac138ad14542fa95aba4a3cb7edf08,

title = "Photoablative etching of polymers for integrated optoelectronic devices",

author = "P. Lemoine and J.d. Magan and W. Blau",

year = "1991",

month = mar,

day = "1",

doi = "10.1016/0167-9317(91)90130-6",

language = "English",

volume = "13",

pages = "447--450",

journal = "Microelectronic Engineering",

issn = "0167-9317",

publisher = "Elsevier BV",

number = "1-4",

}