Original language | English |
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Pages (from-to) | 447-450 |
Journal | Microelectronic Engineering |
Volume | 13 |
Issue number | 1-4 |
DOIs | |
Publication status | Published (in print/issue) - 1 Mar 1991 |
Photoablative etching of polymers for integrated optoelectronic devices
P. Lemoine, J.d. Magan, W. Blau
Research output: Contribution to journal › Article › peer-review
3
Citations
(Scopus)