Photoablative etching of polymers for integrated optoelectronic devices

P. Lemoine, J.d. Magan, W. Blau

Research output: Contribution to journalArticlepeer-review

3 Citations (Scopus)
Original languageEnglish
Pages (from-to)447-450
JournalMicroelectronic Engineering
Volume13
Issue number1-4
DOIs
Publication statusPublished (in print/issue) - 1 Mar 1991

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