A brief overview is presented of the etching and metallization of tin oxide for flat panel display front electrodes. Surface reduction of the tin oxide is shown to be important for both processes. It is shown that self-aligned metallization of the electrode sidewall is possible and leads to 20 times reduction in the sheet resistance.
|Journal||IEE Colloquium (Digest)|
|Publication status||Published - 1995|
|Event||IEE Colloquium on Materials for Displays - London, UK|
Duration: 3 Oct 1995 → 3 Oct 1995