The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.
|Title of host publication||Unknown Host Publication|
|Number of pages||5|
|Publication status||Published - 2003|
|Event||BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 - |
Duration: 1 Jan 2003 → …
|Conference||BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2|
|Period||1/01/03 → …|