Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics

TJ Brosnihan, A Brown, A Brogan, CS Gormley, DJ Collins, SJ Sherman, M Lemkin, NA Polce, MS Davis

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Abstract

The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.
Original languageEnglish
Title of host publicationUnknown Host Publication
Pages1638-1642
Number of pages5
Publication statusPublished - 2003
EventBOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 -
Duration: 1 Jan 2003 → …

Conference

ConferenceBOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
Period1/01/03 → …

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Brosnihan, TJ., Brown, A., Brogan, A., Gormley, CS., Collins, DJ., Sherman, SJ., ... Davis, MS. (2003). Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics. In Unknown Host Publication (pp. 1638-1642)