Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics

TJ Brosnihan; A Brown; A Brogan; CS Gormley; DJ Collins; SJ Sherman; M Lemkin; NA Polce; MS Davis

Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics

TJ Brosnihan, A Brown, A Brogan, CS Gormley, DJ Collins, SJ Sherman, M Lemkin, NA Polce, MS Davis

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.

Original language	English
Title of host publication	Unknown Host Publication
Pages	1638-1642
Number of pages	5
Publication status	Published (in print/issue) - 2003
Event	BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 - Duration: 1 Jan 2003 → …

Conference

Conference	BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2
Period	1/01/03 → …

Bibliographical note

12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03), BOSTON, MA, JUN 08-12, 2003

Cite this

@inproceedings{0fe346d7907f445aa2a24ad14ab5acd6,

title = "Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics",

abstract = "The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.",

author = "TJ Brosnihan and A Brown and A Brogan and CS Gormley and DJ Collins and SJ Sherman and M Lemkin and NA Polce and MS Davis",

note = "12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03), BOSTON, MA, JUN 08-12, 2003; BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2 ; Conference date: 01-01-2003",

year = "2003",

language = "English",

pages = "1638--1642",

booktitle = "Unknown Host Publication",

}

TY - GEN

T1 - Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics

AU - Brosnihan, TJ

AU - Brown, A

AU - Brogan, A

AU - Gormley, CS

AU - Collins, DJ

AU - Sherman, SJ

AU - Lemkin, M

AU - Polce, NA

AU - Davis, MS

N1 - 12th International Conference on Solid-State Sensors, Actuators and Microsystems (TRANSDUCERS 03), BOSTON, MA, JUN 08-12, 2003

PY - 2003

Y1 - 2003

N2 - The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.

AB - The ability of silicon micromachining to produce small, precision, movable parts provides an opportunity for MEMS component use in optical communications networks [1,2]. To address this potential market, Analog Devices has developed the Optical iMEMS((R)) process for fabricating MEMS optical components with integrated, on-chip electronics. While this process could be used to make a variety of optics components including mirrors, shutters and actuators for precision alignment, we report here on a MEMS mirror for optical switching. The device consists of a double-gimbaled mirror with on-chip high voltage drive electronics and low-voltage CMOS for capacitive position sense. The mirror can tilt about both the X- and Y-axis, with position sense in both directions of tilt.

M3 - Conference contribution

SP - 1638

EP - 1642

BT - Unknown Host Publication

T2 - BOSTON TRANSDUCERS'03: DIGEST OF TECHNICAL PAPERS, VOLS 1 AND 2

Y2 - 1 January 2003

ER -

Optical IMEMS (R) - A fabrication process for mems optical switches with integrated on-chip electronics

Abstract

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