Optical Detectors for Microsystems

R Holmes, K Singh, AF Bounaria, CJ Bramwell, S Mohr, J Fanning, NJ Goddard, PR Fielden

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    Abstract

    Anti-Resonant Reflecting Optical Waveguides (ARROWs) are a novel form of optical waveguide technology, where light is confined and guided in the low index region of the sensor. This is achieved by the use of anti-resonant Fabry-Perot reflections. The ARROW sensor offers a 10 fold increase in sensitivity over traditional high index waveguides, which use evanescent sensing.The ARROW sensors are fabricated as slides, where a high index substrate (SF-10) is coated with both a low index silicon oxide (550 nm) and a high index silicon nitride (80 nm) layer.A single ARROW slide offers applications for vapour and Biosensing. However, by sandwiching two slides together such that the coatings are facing, the sensor may be used for applications where a capillary channel is required. These applications include Capillary Isoelectric Focussing (CIEF), Capillary Electrophoresis (CE), or Capillary Flow Cytometry (CFC), which are demonstrated here.For these latter applications, the capillary channel was formed using a novel method, where a photoresist sandwich layer was selectively exposed and developed to form the channel between the two slides.Results were recorded using either a linear CCD array (Vapour and Biosensing) or a 2D CCD Camera, with a Motion Picture Capture Card (CIEF, CE and CFC). Incident light was provided by either a tungsten halogen filament (Vapour and Biosensing) or a frequency doubled 10mW solid state laser operating at 473nm (CIEF, CE and CFC).
    LanguageEnglish
    Title of host publicationUnknown Host Publication
    Number of pages15
    Publication statusPublished - 14 May 1999
    EventRoyal Society of Chemistry - R&D Topics 1999 - Greenwich University
    Duration: 14 May 1999 → …

    Conference

    ConferenceRoyal Society of Chemistry - R&D Topics 1999
    Period14/05/99 → …

    Fingerprint

    optical waveguides
    detectors
    capillary flow
    chutes
    cytometry
    electrophoresis
    sensors
    vapors
    motion pictures
    cards
    solid state lasers
    silicon oxides
    CCD cameras
    photoresists
    silicon nitrides
    halogens
    charge coupled devices
    filaments
    tungsten
    waveguides

    Cite this

    Holmes, R., Singh, K., Bounaria, AF., Bramwell, CJ., Mohr, S., Fanning, J., ... Fielden, PR. (1999). Optical Detectors for Microsystems. In Unknown Host Publication
    Holmes, R ; Singh, K ; Bounaria, AF ; Bramwell, CJ ; Mohr, S ; Fanning, J ; Goddard, NJ ; Fielden, PR. / Optical Detectors for Microsystems. Unknown Host Publication. 1999.
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    title = "Optical Detectors for Microsystems",
    abstract = "Anti-Resonant Reflecting Optical Waveguides (ARROWs) are a novel form of optical waveguide technology, where light is confined and guided in the low index region of the sensor. This is achieved by the use of anti-resonant Fabry-Perot reflections. The ARROW sensor offers a 10 fold increase in sensitivity over traditional high index waveguides, which use evanescent sensing.The ARROW sensors are fabricated as slides, where a high index substrate (SF-10) is coated with both a low index silicon oxide (550 nm) and a high index silicon nitride (80 nm) layer.A single ARROW slide offers applications for vapour and Biosensing. However, by sandwiching two slides together such that the coatings are facing, the sensor may be used for applications where a capillary channel is required. These applications include Capillary Isoelectric Focussing (CIEF), Capillary Electrophoresis (CE), or Capillary Flow Cytometry (CFC), which are demonstrated here.For these latter applications, the capillary channel was formed using a novel method, where a photoresist sandwich layer was selectively exposed and developed to form the channel between the two slides.Results were recorded using either a linear CCD array (Vapour and Biosensing) or a 2D CCD Camera, with a Motion Picture Capture Card (CIEF, CE and CFC). Incident light was provided by either a tungsten halogen filament (Vapour and Biosensing) or a frequency doubled 10mW solid state laser operating at 473nm (CIEF, CE and CFC).",
    author = "R Holmes and K Singh and AF Bounaria and CJ Bramwell and S Mohr and J Fanning and NJ Goddard and PR Fielden",
    year = "1999",
    month = "5",
    day = "14",
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    booktitle = "Unknown Host Publication",

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    Holmes, R, Singh, K, Bounaria, AF, Bramwell, CJ, Mohr, S, Fanning, J, Goddard, NJ & Fielden, PR 1999, Optical Detectors for Microsystems. in Unknown Host Publication. Royal Society of Chemistry - R&D Topics 1999, 14/05/99.

    Optical Detectors for Microsystems. / Holmes, R; Singh, K; Bounaria, AF; Bramwell, CJ; Mohr, S; Fanning, J; Goddard, NJ; Fielden, PR.

    Unknown Host Publication. 1999.

    Research output: Chapter in Book/Report/Conference proceedingConference contribution

    TY - GEN

    T1 - Optical Detectors for Microsystems

    AU - Holmes, R

    AU - Singh, K

    AU - Bounaria, AF

    AU - Bramwell, CJ

    AU - Mohr, S

    AU - Fanning, J

    AU - Goddard, NJ

    AU - Fielden, PR

    PY - 1999/5/14

    Y1 - 1999/5/14

    N2 - Anti-Resonant Reflecting Optical Waveguides (ARROWs) are a novel form of optical waveguide technology, where light is confined and guided in the low index region of the sensor. This is achieved by the use of anti-resonant Fabry-Perot reflections. The ARROW sensor offers a 10 fold increase in sensitivity over traditional high index waveguides, which use evanescent sensing.The ARROW sensors are fabricated as slides, where a high index substrate (SF-10) is coated with both a low index silicon oxide (550 nm) and a high index silicon nitride (80 nm) layer.A single ARROW slide offers applications for vapour and Biosensing. However, by sandwiching two slides together such that the coatings are facing, the sensor may be used for applications where a capillary channel is required. These applications include Capillary Isoelectric Focussing (CIEF), Capillary Electrophoresis (CE), or Capillary Flow Cytometry (CFC), which are demonstrated here.For these latter applications, the capillary channel was formed using a novel method, where a photoresist sandwich layer was selectively exposed and developed to form the channel between the two slides.Results were recorded using either a linear CCD array (Vapour and Biosensing) or a 2D CCD Camera, with a Motion Picture Capture Card (CIEF, CE and CFC). Incident light was provided by either a tungsten halogen filament (Vapour and Biosensing) or a frequency doubled 10mW solid state laser operating at 473nm (CIEF, CE and CFC).

    AB - Anti-Resonant Reflecting Optical Waveguides (ARROWs) are a novel form of optical waveguide technology, where light is confined and guided in the low index region of the sensor. This is achieved by the use of anti-resonant Fabry-Perot reflections. The ARROW sensor offers a 10 fold increase in sensitivity over traditional high index waveguides, which use evanescent sensing.The ARROW sensors are fabricated as slides, where a high index substrate (SF-10) is coated with both a low index silicon oxide (550 nm) and a high index silicon nitride (80 nm) layer.A single ARROW slide offers applications for vapour and Biosensing. However, by sandwiching two slides together such that the coatings are facing, the sensor may be used for applications where a capillary channel is required. These applications include Capillary Isoelectric Focussing (CIEF), Capillary Electrophoresis (CE), or Capillary Flow Cytometry (CFC), which are demonstrated here.For these latter applications, the capillary channel was formed using a novel method, where a photoresist sandwich layer was selectively exposed and developed to form the channel between the two slides.Results were recorded using either a linear CCD array (Vapour and Biosensing) or a 2D CCD Camera, with a Motion Picture Capture Card (CIEF, CE and CFC). Incident light was provided by either a tungsten halogen filament (Vapour and Biosensing) or a frequency doubled 10mW solid state laser operating at 473nm (CIEF, CE and CFC).

    M3 - Conference contribution

    BT - Unknown Host Publication

    ER -

    Holmes R, Singh K, Bounaria AF, Bramwell CJ, Mohr S, Fanning J et al. Optical Detectors for Microsystems. In Unknown Host Publication. 1999