NH3 sensing characteristics of pure and Al modified WO3 thin films

C. P. Goyal; N. S. Ramgir; P. K. Sharma; N. Datta; M. Kaur; V. Parey; A. K. Debnath; F. Z. Haque; D. K. Aswal; S. K. Gupta

doi:10.1109/ICANMEET.2013.6609364

NH3 sensing characteristics of pure and Al modified WO₃ thin films

C. P. Goyal
, N. S. Ramgir
, P. K. Sharma
, N. Datta
, M. Kaur
, V. Parey
, A. K. Debnath
, F. Z. Haque
, D. K. Aswal
, S. K. Gupta

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

2 Citations (Scopus)

Abstract

Ammonia sensing properties of pure and Al modified WO₃ thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO ₃ (8 min) towards NH₃ (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH₃.

Original language	English
Title of host publication	Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013
Publisher	IEEE Xplore
Pages	560-562
Number of pages	3
ISBN (Print)	9781479913794
DOIs	https://doi.org/10.1109/ICANMEET.2013.6609364
Publication status	Published (in print/issue) - 30 Oct 2013
Event	2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013 - Chennai, India Duration: 24 Jul 2013 → 26 Jul 2013

Conference

Conference	2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013
Country/Territory	India
City	Chennai
Period	24/07/13 → 26/07/13

Keywords

Al
NH
RF sputtering
Sensor
Thin Film
WO

Access to Document

10.1109/ICANMEET.2013.6609364

Cite this

Goyal, C. P., Ramgir, N. S., Sharma, P. K., Datta, N., Kaur, M., Parey, V., Debnath, A. K., Haque, F. Z., Aswal, D. K., & Gupta, S. K. (2013). NH3 sensing characteristics of pure and Al modified WO₃ thin films. In Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013 (pp. 560-562). Article 6609364 IEEE Xplore. https://doi.org/10.1109/ICANMEET.2013.6609364

@inproceedings{fa3317b0c8314f038d0711ce0610defe,

title = "NH3 sensing characteristics of pure and Al modified WO3 thin films",

abstract = "Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.",

keywords = "Al, NH, RF sputtering, Sensor, Thin Film, WO",

author = "Goyal, \{C. P.\} and Ramgir, \{N. S.\} and Sharma, \{P. K.\} and N. Datta and M. Kaur and V. Parey and Debnath, \{A. K.\} and Haque, \{F. Z.\} and Aswal, \{D. K.\} and Gupta, \{S. K.\}",

year = "2013",

month = oct,

day = "30",

doi = "10.1109/ICANMEET.2013.6609364",

language = "English",

isbn = "9781479913794",

pages = "560--562",

booktitle = "Proceedings of the International Conference on {"}Advanced Nanomaterials and Emerging Engineering Technologies{"}, ICANMEET 2013",

publisher = "IEEE Xplore",

address = "United States",

note = "2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013 ; Conference date: 24-07-2013 Through 26-07-2013",

}

Goyal, CP, Ramgir, NS, Sharma, PK, Datta, N, Kaur, M, Parey, V, Debnath, AK, Haque, FZ, Aswal, DK & Gupta, SK 2013, NH3 sensing characteristics of pure and Al modified WO₃ thin films. in Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013., 6609364, IEEE Xplore, pp. 560-562, 2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013, Chennai, India, 24/07/13. https://doi.org/10.1109/ICANMEET.2013.6609364

NH3 sensing characteristics of pure and Al modified WO₃ thin films. / Goyal, C. P.; Ramgir, N. S.; Sharma, P. K. et al.
Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013. IEEE Xplore, 2013. p. 560-562 6609364.

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - NH3 sensing characteristics of pure and Al modified WO3 thin films

AU - Goyal, C. P.

AU - Ramgir, N. S.

AU - Sharma, P. K.

AU - Datta, N.

AU - Kaur, M.

AU - Parey, V.

AU - Debnath, A. K.

AU - Haque, F. Z.

AU - Aswal, D. K.

AU - Gupta, S. K.

PY - 2013/10/30

Y1 - 2013/10/30

N2 - Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.

AB - Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.

KW - Al

KW - NH

KW - RF sputtering

KW - Sensor

KW - Thin Film

KW - WO

UR - https://www.scopus.com/pages/publications/84886418496

U2 - 10.1109/ICANMEET.2013.6609364

DO - 10.1109/ICANMEET.2013.6609364

M3 - Conference contribution

AN - SCOPUS:84886418496

SN - 9781479913794

SP - 560

EP - 562

BT - Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013

PB - IEEE Xplore

T2 - 2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013

Y2 - 24 July 2013 through 26 July 2013

ER -