NH3 sensing characteristics of pure and Al modified WO3 thin films

C. P. Goyal, N. S. Ramgir, P. K. Sharma, N. Datta, M. Kaur, V. Parey, A. K. Debnath, F. Z. Haque, D. K. Aswal, S. K. Gupta

Research output: Chapter in Book/Report/Conference proceedingConference contribution

1 Citation (Scopus)

Abstract

Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.

LanguageEnglish
Title of host publicationProceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013
Pages560-562
Number of pages3
DOIs
Publication statusPublished - 30 Oct 2013
Event2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013 - Chennai, India
Duration: 24 Jul 201326 Jul 2013

Conference

Conference2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013
CountryIndia
CityChennai
Period24/07/1326/07/13

Fingerprint

Thin films
Sensors
Ammonia
Sputtering
Kinetics
Temperature

Keywords

  • Al
  • NH
  • RF sputtering
  • Sensor
  • Thin Film
  • WO

Cite this

Goyal, C. P., Ramgir, N. S., Sharma, P. K., Datta, N., Kaur, M., Parey, V., ... Gupta, S. K. (2013). NH3 sensing characteristics of pure and Al modified WO3 thin films. In Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013 (pp. 560-562). [6609364] https://doi.org/10.1109/ICANMEET.2013.6609364
Goyal, C. P. ; Ramgir, N. S. ; Sharma, P. K. ; Datta, N. ; Kaur, M. ; Parey, V. ; Debnath, A. K. ; Haque, F. Z. ; Aswal, D. K. ; Gupta, S. K. / NH3 sensing characteristics of pure and Al modified WO3 thin films. Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013. 2013. pp. 560-562
@inproceedings{fa3317b0c8314f038d0711ce0610defe,
title = "NH3 sensing characteristics of pure and Al modified WO3 thin films",
abstract = "Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.",
keywords = "Al, NH, RF sputtering, Sensor, Thin Film, WO",
author = "Goyal, {C. P.} and Ramgir, {N. S.} and Sharma, {P. K.} and N. Datta and M. Kaur and V. Parey and Debnath, {A. K.} and Haque, {F. Z.} and Aswal, {D. K.} and Gupta, {S. K.}",
year = "2013",
month = "10",
day = "30",
doi = "10.1109/ICANMEET.2013.6609364",
language = "English",
isbn = "9781479913794",
pages = "560--562",
booktitle = "Proceedings of the International Conference on {"}Advanced Nanomaterials and Emerging Engineering Technologies{"}, ICANMEET 2013",

}

Goyal, CP, Ramgir, NS, Sharma, PK, Datta, N, Kaur, M, Parey, V, Debnath, AK, Haque, FZ, Aswal, DK & Gupta, SK 2013, NH3 sensing characteristics of pure and Al modified WO3 thin films. in Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013., 6609364, pp. 560-562, 2013 International Conference on Advanced Nanomaterials and Emerging Engineering Technologies, ICANMEET 2013, Chennai, India, 24/07/13. https://doi.org/10.1109/ICANMEET.2013.6609364

NH3 sensing characteristics of pure and Al modified WO3 thin films. / Goyal, C. P.; Ramgir, N. S.; Sharma, P. K.; Datta, N.; Kaur, M.; Parey, V.; Debnath, A. K.; Haque, F. Z.; Aswal, D. K.; Gupta, S. K.

Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013. 2013. p. 560-562 6609364.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - NH3 sensing characteristics of pure and Al modified WO3 thin films

AU - Goyal, C. P.

AU - Ramgir, N. S.

AU - Sharma, P. K.

AU - Datta, N.

AU - Kaur, M.

AU - Parey, V.

AU - Debnath, A. K.

AU - Haque, F. Z.

AU - Aswal, D. K.

AU - Gupta, S. K.

PY - 2013/10/30

Y1 - 2013/10/30

N2 - Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.

AB - Ammonia sensing properties of pure and Al modified WO3 thin films prepared using RF sputtering have been investigated. Both the sensor films exhibited a maximum response at an operating temperature of 250°C. Modification with Al has been demonstrated to improve the response kinetics in particular the response time (6 min) in comparison to that of pure WO 3 (8 min) towards NH3 (100 ppm). Interestingly, both the sensor films showed an increase in resistance i.e., a p-type behavior upon exposure to NH3.

KW - Al

KW - NH

KW - RF sputtering

KW - Sensor

KW - Thin Film

KW - WO

UR - http://www.scopus.com/inward/record.url?scp=84886418496&partnerID=8YFLogxK

U2 - 10.1109/ICANMEET.2013.6609364

DO - 10.1109/ICANMEET.2013.6609364

M3 - Conference contribution

SN - 9781479913794

SP - 560

EP - 562

BT - Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013

ER -

Goyal CP, Ramgir NS, Sharma PK, Datta N, Kaur M, Parey V et al. NH3 sensing characteristics of pure and Al modified WO3 thin films. In Proceedings of the International Conference on "Advanced Nanomaterials and Emerging Engineering Technologies", ICANMEET 2013. 2013. p. 560-562. 6609364 https://doi.org/10.1109/ICANMEET.2013.6609364