Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez, J M Garcia-Martin, A Garcia-Valenzuela, Manuel Macias-Montero, F J Ferrer, J Santiso, V Rico, J Cotrino, A R Gonzalez-Elipe, A Palmero

    Research output: Contribution to journalArticle

    36 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)045303
    JournalJournal of Physics D: Applied Physics
    Volume49
    Issue number4
    DOIs
    Publication statusPublished - 2015

    Keywords

    • Nanostructures
    • thin films
    • magnetron sputtering
    • oblique angles

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