Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez, J M Garcia-Martin, A Garcia-Valenzuela, Manuel Macias-Montero, F J Ferrer, J Santiso, V Rico, J Cotrino, A R Gonzalez-Elipe, A Palmero

    Research output: Contribution to journalArticle

    26 Citations (Scopus)
    LanguageEnglish
    Pages045303
    JournalJournal of Physics D: Applied Physics
    Volume49
    Issue number4
    DOIs
    Publication statusPublished - 2015

    Keywords

    • Nanostructures
    • thin films
    • magnetron sputtering
    • oblique angles

    Cite this

    Alvarez, R., Garcia-Martin, J. M., Garcia-Valenzuela, A., Macias-Montero, M., Ferrer, F. J., Santiso, J., ... Palmero, A. (2015). Nanostructured Ti thin films by magnetron sputtering at oblique angles. Journal of Physics D: Applied Physics, 49(4), 045303. https://doi.org/10.1088/0022-3727/49/4/045303
    Alvarez, R ; Garcia-Martin, J M ; Garcia-Valenzuela, A ; Macias-Montero, Manuel ; Ferrer, F J ; Santiso, J ; Rico, V ; Cotrino, J ; Gonzalez-Elipe, A R ; Palmero, A. / Nanostructured Ti thin films by magnetron sputtering at oblique angles. In: Journal of Physics D: Applied Physics. 2015 ; Vol. 49, No. 4. pp. 045303.
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    title = "Nanostructured Ti thin films by magnetron sputtering at oblique angles",
    keywords = "Nanostructures, thin films, magnetron sputtering, oblique angles",
    author = "R Alvarez and Garcia-Martin, {J M} and A Garcia-Valenzuela and Manuel Macias-Montero and Ferrer, {F J} and J Santiso and V Rico and J Cotrino and Gonzalez-Elipe, {A R} and A Palmero",
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    doi = "10.1088/0022-3727/49/4/045303",
    language = "English",
    volume = "49",
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    journal = "Journal of Physics D: Applied Physics",
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    Alvarez, R, Garcia-Martin, JM, Garcia-Valenzuela, A, Macias-Montero, M, Ferrer, FJ, Santiso, J, Rico, V, Cotrino, J, Gonzalez-Elipe, AR & Palmero, A 2015, 'Nanostructured Ti thin films by magnetron sputtering at oblique angles', Journal of Physics D: Applied Physics, vol. 49, no. 4, pp. 045303. https://doi.org/10.1088/0022-3727/49/4/045303

    Nanostructured Ti thin films by magnetron sputtering at oblique angles. / Alvarez, R; Garcia-Martin, J M; Garcia-Valenzuela, A; Macias-Montero, Manuel; Ferrer, F J; Santiso, J; Rico, V; Cotrino, J; Gonzalez-Elipe, A R; Palmero, A.

    In: Journal of Physics D: Applied Physics, Vol. 49, No. 4, 2015, p. 045303.

    Research output: Contribution to journalArticle

    TY - JOUR

    T1 - Nanostructured Ti thin films by magnetron sputtering at oblique angles

    AU - Alvarez, R

    AU - Garcia-Martin, J M

    AU - Garcia-Valenzuela, A

    AU - Macias-Montero, Manuel

    AU - Ferrer, F J

    AU - Santiso, J

    AU - Rico, V

    AU - Cotrino, J

    AU - Gonzalez-Elipe, A R

    AU - Palmero, A

    PY - 2015

    Y1 - 2015

    KW - Nanostructures

    KW - thin films

    KW - magnetron sputtering

    KW - oblique angles

    U2 - 10.1088/0022-3727/49/4/045303

    DO - 10.1088/0022-3727/49/4/045303

    M3 - Article

    VL - 49

    SP - 045303

    JO - Journal of Physics D: Applied Physics

    T2 - Journal of Physics D: Applied Physics

    JF - Journal of Physics D: Applied Physics

    SN - 0022-3727

    IS - 4

    ER -

    Alvarez R, Garcia-Martin JM, Garcia-Valenzuela A, Macias-Montero M, Ferrer FJ, Santiso J et al. Nanostructured Ti thin films by magnetron sputtering at oblique angles. Journal of Physics D: Applied Physics. 2015;49(4):045303. https://doi.org/10.1088/0022-3727/49/4/045303