Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez; J M Garcia-Martin; A Garcia-Valenzuela; Manuel Macias-Montero; F J Ferrer; J Santiso; V Rico; J Cotrino; A R Gonzalez-Elipe; A Palmero

doi:10.1088/0022-3727/49/4/045303

Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez, J M Garcia-Martin, A Garcia-Valenzuela, Manuel Macias-Montero, F J Ferrer, J Santiso, V Rico, J Cotrino, A R Gonzalez-Elipe, A Palmero

Research output: Contribution to journal › Article

35 Citations (Scopus)

Original language	English
Pages (from-to)	045303
Journal	Journal of Physics D: Applied Physics
Volume	49
Issue number	4
DOIs	https://doi.org/10.1088/0022-3727/49/4/045303
Publication status	Published - 2015

Keywords

Nanostructures
thin films
magnetron sputtering
oblique angles

Access to Document

10.1088/0022-3727/49/4/045303

Cite this

Alvarez, R., Garcia-Martin, J. M., Garcia-Valenzuela, A., Macias-Montero, M., Ferrer, F. J., Santiso, J., Rico, V., Cotrino, J., Gonzalez-Elipe, A. R., & Palmero, A. (2015). Nanostructured Ti thin films by magnetron sputtering at oblique angles. Journal of Physics D: Applied Physics, 49(4), 045303. https://doi.org/10.1088/0022-3727/49/4/045303

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AU - Alvarez, R

AU - Garcia-Martin, J M

AU - Garcia-Valenzuela, A

AU - Macias-Montero, Manuel

AU - Ferrer, F J

AU - Santiso, J

AU - Rico, V

AU - Cotrino, J

AU - Gonzalez-Elipe, A R

AU - Palmero, A

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KW - Nanostructures

KW - thin films

KW - magnetron sputtering

KW - oblique angles

U2 - 10.1088/0022-3727/49/4/045303

DO - 10.1088/0022-3727/49/4/045303

M3 - Article

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SP - 045303

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

SN - 0022-3727

IS - 4

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