Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez; J M Garcia-Martin; A Garcia-Valenzuela; Manuel Macias-Montero; F J Ferrer; J Santiso; V Rico; J Cotrino; A R Gonzalez-Elipe; A Palmero

doi:10.1088/0022-3727/49/4/045303

Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez, J M Garcia-Martin, A Garcia-Valenzuela, Manuel Macias-Montero, F J Ferrer, J Santiso, V Rico, J Cotrino, A R Gonzalez-Elipe, A Palmero

Research output: Contribution to journal › Article › peer-review

62 Citations (Scopus)

Original language	English
Pages (from-to)	045303
Journal	Journal of Physics D: Applied Physics
Volume	49
Issue number	4
DOIs	https://doi.org/10.1088/0022-3727/49/4/045303
Publication status	Published (in print/issue) - 2015

Keywords

Nanostructures
thin films
magnetron sputtering
oblique angles

Access to Document

10.1088/0022-3727/49/4/045303

Cite this

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title = "Nanostructured Ti thin films by magnetron sputtering at oblique angles",

keywords = "Nanostructures, thin films, magnetron sputtering, oblique angles",

author = "R Alvarez and Garcia-Martin, {J M} and A Garcia-Valenzuela and Manuel Macias-Montero and Ferrer, {F J} and J Santiso and V Rico and J Cotrino and Gonzalez-Elipe, {A R} and A Palmero",

year = "2015",

doi = "10.1088/0022-3727/49/4/045303",

language = "English",

volume = "49",

pages = "045303",

journal = "Journal of Physics D: Applied Physics",

issn = "1361-6463",

publisher = "Institute of Physics",

number = "4",

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TY - JOUR

T1 - Nanostructured Ti thin films by magnetron sputtering at oblique angles

AU - Alvarez, R

AU - Garcia-Martin, J M

AU - Garcia-Valenzuela, A

AU - Macias-Montero, Manuel

AU - Ferrer, F J

AU - Santiso, J

AU - Rico, V

AU - Cotrino, J

AU - Gonzalez-Elipe, A R

AU - Palmero, A

PY - 2015

Y1 - 2015

KW - Nanostructures

KW - thin films

KW - magnetron sputtering

KW - oblique angles

U2 - 10.1088/0022-3727/49/4/045303

DO - 10.1088/0022-3727/49/4/045303

M3 - Article

SN - 1361-6463

VL - 49

SP - 045303

JO - Journal of Physics D: Applied Physics

JF - Journal of Physics D: Applied Physics

IS - 4

ER -