Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez, J M Garcia-Martin, A Garcia-Valenzuela, Manuel Macias-Montero, F J Ferrer, J Santiso, V Rico, J Cotrino, A R Gonzalez-Elipe, A Palmero

Research output: Contribution to journalArticlepeer-review

64 Citations (Scopus)
Original languageEnglish
Pages (from-to)045303
JournalJournal of Physics D: Applied Physics
Volume49
Issue number4
DOIs
Publication statusPublished (in print/issue) - 2015

Keywords

  • Nanostructures
  • thin films
  • magnetron sputtering
  • oblique angles

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