Nanostructured Ti thin films by magnetron sputtering at oblique angles

R Alvarez, J M Garcia-Martin, A Garcia-Valenzuela, Manuel Macias-Montero, F J Ferrer, J Santiso, V Rico, J Cotrino, A R Gonzalez-Elipe, A Palmero

    Research output: Contribution to journalArticle

    32 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)045303
    JournalJournal of Physics D: Applied Physics
    Volume49
    Issue number4
    DOIs
    Publication statusPublished - 2015

    Keywords

    • Nanostructures
    • thin films
    • magnetron sputtering
    • oblique angles

    Cite this

    Alvarez, R., Garcia-Martin, J. M., Garcia-Valenzuela, A., Macias-Montero, M., Ferrer, F. J., Santiso, J., ... Palmero, A. (2015). Nanostructured Ti thin films by magnetron sputtering at oblique angles. Journal of Physics D: Applied Physics, 49(4), 045303. https://doi.org/10.1088/0022-3727/49/4/045303