Multi- Domain analysis of MEMS Based Si structures

Nikhil Bhalla, S.S. Li, Danny Wen Yaw Chung

Research output: Contribution to conferencePaper

Original languageEnglish
Publication statusPublished - 2011
EventCOMSOL-International Conference - Boston, United States
Duration: 15 Oct 2011 → …

Conference

ConferenceCOMSOL-International Conference
CountryUnited States
CityBoston
Period15/10/11 → …

Cite this

Bhalla, N., Li, S. S., & Chung, D. W. Y. (2011). Multi- Domain analysis of MEMS Based Si structures. Paper presented at COMSOL-International Conference, Boston, United States.