Multi- Domain analysis of MEMS Based Si structures

Nikhil Bhalla, S.S. Li, Danny Wen Yaw Chung

Research output: Contribution to conferencePaper

Conference

ConferenceCOMSOL-International Conference
CountryUnited States
CityBoston
Period15/10/11 → …

Cite this

Bhalla, N., Li, S. S., & Chung, D. W. Y. (2011). Multi- Domain analysis of MEMS Based Si structures. Paper presented at COMSOL-International Conference, Boston, United States.
Bhalla, Nikhil ; Li, S.S. ; Chung, Danny Wen Yaw. / Multi- Domain analysis of MEMS Based Si structures. Paper presented at COMSOL-International Conference, Boston, United States.
@conference{0ff566066dae431b99fe9b603385d63b,
title = "Multi- Domain analysis of MEMS Based Si structures",
author = "Nikhil Bhalla and S.S. Li and Chung, {Danny Wen Yaw}",
year = "2011",
language = "English",
note = "COMSOL-International Conference ; Conference date: 15-10-2011",

}

Bhalla, N, Li, SS & Chung, DWY 2011, 'Multi- Domain analysis of MEMS Based Si structures' Paper presented at COMSOL-International Conference, Boston, United States, 15/10/11, .

Multi- Domain analysis of MEMS Based Si structures. / Bhalla, Nikhil; Li, S.S.; Chung, Danny Wen Yaw.

2011. Paper presented at COMSOL-International Conference, Boston, United States.

Research output: Contribution to conferencePaper

TY - CONF

T1 - Multi- Domain analysis of MEMS Based Si structures

AU - Bhalla, Nikhil

AU - Li, S.S.

AU - Chung, Danny Wen Yaw

PY - 2011

Y1 - 2011

M3 - Paper

ER -

Bhalla N, Li SS, Chung DWY. Multi- Domain analysis of MEMS Based Si structures. 2011. Paper presented at COMSOL-International Conference, Boston, United States.