Modeling and fabrication of a microelectromechanical microwave switch

Ching Liang Dai; Heng Ming Hsu; Ming Chang Tsai; Ming Ming Hsieh; Ming Wei Chang

doi:10.1016/j.mejo.2007.03.012

Modeling and fabrication of a microelectromechanical microwave switch

Ching Liang Dai, Heng Ming Hsu, Ming Chang Tsai, Ming Ming Hsieh, Ming Wei Chang

National Chung Hsing University

Research output: Contribution to journal › Article › peer-review

32 Citations (Scopus)

Abstract

A microelectromechanical microwave switch manufactured by using a complementary metal oxide semiconductor (CMOS) post-process has been implemented. An equivalent circuit model is proposed to analyze the performance of the microwave switch. The components of the microwave switch consist of a coplanar waveguide (CPW), a suspended membrane and supported springs. The post-process requires only one wet etching to etch the sacrificial layer, and to release the suspended structures. Experimental results show that the switch has an insertion loss of -2 dB at 50 GHz and an isolation of -15 dB at 50 GHz. The driving voltage of the switch approximates to 19 V.

Original language	English
Pages (from-to)	519-524
Number of pages	6
Journal	Microelectronics Journal
Volume	38
Issue number	4-5
DOIs	https://doi.org/10.1016/j.mejo.2007.03.012
Publication status	Published (in print/issue) - 1 Apr 2007

Funding

The authors would like to thank National Center for High-performance Computing (NCHC) for chip simulation, National Chip Implementation Center (CIC) for chip fabrication and the National Science Council of the Republic of China for financially supporting this research under Contract no. NSC 95-2221-E-005-043-MY2.

Keywords

CMOS
Micro actuator
Microwave switch

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10.1016/j.mejo.2007.03.012

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title = "Modeling and fabrication of a microelectromechanical microwave switch",

abstract = "A microelectromechanical microwave switch manufactured by using a complementary metal oxide semiconductor (CMOS) post-process has been implemented. An equivalent circuit model is proposed to analyze the performance of the microwave switch. The components of the microwave switch consist of a coplanar waveguide (CPW), a suspended membrane and supported springs. The post-process requires only one wet etching to etch the sacrificial layer, and to release the suspended structures. Experimental results show that the switch has an insertion loss of -2 dB at 50 GHz and an isolation of -15 dB at 50 GHz. The driving voltage of the switch approximates to 19 V.",

keywords = "CMOS, Micro actuator, Microwave switch",

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AU - Dai, Ching Liang

AU - Hsu, Heng Ming

AU - Tsai, Ming Chang

AU - Hsieh, Ming Ming

AU - Chang, Ming Wei

PY - 2007/4/1

Y1 - 2007/4/1

N2 - A microelectromechanical microwave switch manufactured by using a complementary metal oxide semiconductor (CMOS) post-process has been implemented. An equivalent circuit model is proposed to analyze the performance of the microwave switch. The components of the microwave switch consist of a coplanar waveguide (CPW), a suspended membrane and supported springs. The post-process requires only one wet etching to etch the sacrificial layer, and to release the suspended structures. Experimental results show that the switch has an insertion loss of -2 dB at 50 GHz and an isolation of -15 dB at 50 GHz. The driving voltage of the switch approximates to 19 V.

AB - A microelectromechanical microwave switch manufactured by using a complementary metal oxide semiconductor (CMOS) post-process has been implemented. An equivalent circuit model is proposed to analyze the performance of the microwave switch. The components of the microwave switch consist of a coplanar waveguide (CPW), a suspended membrane and supported springs. The post-process requires only one wet etching to etch the sacrificial layer, and to release the suspended structures. Experimental results show that the switch has an insertion loss of -2 dB at 50 GHz and an isolation of -15 dB at 50 GHz. The driving voltage of the switch approximates to 19 V.

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KW - Micro actuator

KW - Microwave switch

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EP - 524

JO - Microelectronics Journal

JF - Microelectronics Journal

IS - 4-5

ER -

Modeling and fabrication of a microelectromechanical microwave switch

Abstract

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Keywords

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