Modeling and fabrication of a microelectromechanical microwave switch

Ching Liang Dai, Heng Ming Hsu, Ming Chang Tsai, Ming Ming Hsieh, Ming Wei Chang

Research output: Contribution to journalArticlepeer-review

31 Citations (Scopus)


A microelectromechanical microwave switch manufactured by using a complementary metal oxide semiconductor (CMOS) post-process has been implemented. An equivalent circuit model is proposed to analyze the performance of the microwave switch. The components of the microwave switch consist of a coplanar waveguide (CPW), a suspended membrane and supported springs. The post-process requires only one wet etching to etch the sacrificial layer, and to release the suspended structures. Experimental results show that the switch has an insertion loss of -2 dB at 50 GHz and an isolation of -15 dB at 50 GHz. The driving voltage of the switch approximates to 19 V.

Original languageEnglish
Pages (from-to)519-524
Number of pages6
JournalMicroelectronics Journal
Issue number4-5
Publication statusPublished (in print/issue) - 1 Apr 2007


  • CMOS
  • Micro actuator
  • Microwave switch


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