Engineering & Materials Science
Membrane structures
100%
Graphite
71%
Characterization (materials science)
63%
NEMS
52%
Plasma enhanced chemical vapor deposition
51%
Microfabrication
45%
Compressive stress
37%
MEMS
33%
Buckling
31%
Catalysts
30%
Elastic moduli
30%
Silicon
28%
Substrates
25%
Mechanical properties
23%
Physics & Astronomy
membrane structures
98%
graphite
61%
bows
41%
characterization
40%
buckling
39%
microelectromechanical systems
34%
catalysts
33%
modulus of elasticity
29%
vapor deposition
27%
wafers
27%
mechanical properties
24%
profiles
19%
silicon
19%
Chemistry
Plasma Enhanced Chemical Vapour Deposition
86%
Young's Modulus
76%
Graphite
52%
Strain
50%
Catalyst
30%