Mechanical characterisation of nanocrystalline graphite using micromechanical structures

Sam Fishlock, David Grech, John McBride, Harold Chong, Suan Hui Pu

Research output: Contribution to journalArticle

8 Citations (Scopus)
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Abstract

Conductive nanocrystalline graphite has been deposited using plasma-enhanced chemical vapour deposition at 750 °C, directly onto silicon substrates without any catalyst and fabricated into micromechanical membrane and beam structures. Using the buckling profile of the membrane and beam structures, we measure a built-in strain of − 0.0142 and through wafer-bow measurement, a compressive stress of 436 MPa. From this we have calculated the Young's modulus of nanographite as 23.0 ± 2.7 GPa. This represents a scalable method for fabricating nanographite MEMS and NEMS devices via a microfabrication-compatible process and provides useful mechanical properties to enable design of future devices.
Original languageEnglish
Article numberVolume 159
Pages (from-to)184-189
Number of pages6
JournalMicroelectronic Engineering
DOIs
Publication statusPublished - 22 Mar 2016

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