Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

A. Morelli; F. Johann; N. Schammelt; D. McGrouther; I. Vrejoiu

doi:10.1063/1.4801904

Mask assisted fabrication of nanoislands of BiFeO₃ by ion beam milling

A. Morelli, F. Johann, N. Schammelt, D. McGrouther, I. Vrejoiu

Research output: Contribution to journal › Article › peer-review

20 Citations (Scopus)

Abstract

We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO₃ (BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO₃ thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

Original language	English
Article number	154101
Journal	Journal of Applied Physics
Volume	113
Issue number	15
DOIs	https://doi.org/10.1063/1.4801904
Publication status	Published (in print/issue) - 1 Apr 2013

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@article{28954b4531e54554aa20abc0de7977a0,

title = "Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling",

abstract = "We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3 (BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.",

author = "A. Morelli and F. Johann and N. Schammelt and D. McGrouther and I. Vrejoiu",

year = "2013",

month = apr,

day = "1",

doi = "10.1063/1.4801904",

language = "English",

volume = "113",

journal = "Journal of Applied Physics",

issn = "0021-8979",

publisher = "American Institute of Physics",

number = "15",

}

TY - JOUR

T1 - Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

AU - Morelli, A.

AU - Johann, F.

AU - Schammelt, N.

AU - McGrouther, D.

AU - Vrejoiu, I.

PY - 2013/4/1

Y1 - 2013/4/1

N2 - We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3 (BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

AB - We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3 (BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

UR - http://www.scopus.com/inward/record.url?scp=84884300163&partnerID=8YFLogxK

U2 - 10.1063/1.4801904

DO - 10.1063/1.4801904

M3 - Article

AN - SCOPUS:84884300163

SN - 0021-8979

VL - 113

JO - Journal of Applied Physics

JF - Journal of Applied Physics

IS - 15

M1 - 154101

ER -

Mask assisted fabrication of nanoislands of BiFeO₃ by ion beam milling

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