Mask assisted fabrication of nanoislands of BiFeO3 by ion beam milling

A. Morelli, F. Johann, N. Schammelt, D. McGrouther, I. Vrejoiu

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19 Citations (Scopus)

Abstract

We report on a low-damage method for direct and rapid fabrication of arrays of epitaxial BiFeO3 (BFO) nanoislands. An array of aluminium dots is evaporated through a stencil mask on top of an epitaxial BiFeO3 thin film. Low energy focused ion beam milling of an area several microns wide containing the array-covered film leads to removal of the bismuth ferrite in between the aluminium-masked dots. By chemical etching of the remaining aluminium, nanoscale epitaxial bismuth ferrite islands with diameter ∼250 nm were obtained. Piezoresponse force microscopy showed that as-fabricated structures exhibited good piezoelectric and ferroelectric properties, with polarization state retention of several days.

Original languageEnglish
Article number154101
JournalJournal of Applied Physics
Volume113
Issue number15
DOIs
Publication statusPublished (in print/issue) - 1 Apr 2013

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