Iron, nitrogen and silicon doped diamond like carbon (DLC) thin films: A comparative study

SC Ray, WF Pong, P Papakonstantinou

Research output: Contribution to journalArticle

33 Citations (Scopus)

Abstract

The X-ray absorption near edge structure (XANES), X-ray photoelectron spectroscopy (XPS), valence band photoemission (VB-PES) and Raman spectroscopy results show that the incorporation of nitrogen in pulsed laser deposited diamond like carbon (DLC) thin films, reverts the sp3 network to sp2 as evidenced by an increase of the sp2 cluster and ID/IG ratio in C K-edge XANES and Raman spectra respectively which reduces the hardness/ Young's modulus into the film network. Si-doped DLC film deposited in a plasma enhanced chemical vapour deposition process reduces the sp2 cluster and ID/IG ratio that causes the decrease of hardness/Young's modulus of the film structure. The Fe-doped DLC films deposited by dip coating technique increase the hardness/Young's modulus with an increase of sp3-content in DLC film structure.
Original languageEnglish
Pages (from-to)42-47
JournalThin Solid Films
Volume610
Early online date3 May 2016
DOIs
Publication statusPublished - 1 Jul 2016

Keywords

  • Diamond like carbon (DLC)
  • Fe-doped DLC
  • N-doped DLC
  • amorphous carbon
  • Si-doped DLC
  • X-ray absorption near edge structure (XANES)
  • X-ray photoelectron spectroscopy (XPS)
  • valence band photoemission (VB-PES)
  • Raman spectroscopy

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