Original language | English |
---|---|
Pages (from-to) | 054312 |
Journal | Journal of Applied Physics |
Volume | 111 |
Issue number | 5 |
DOIs | |
Publication status | Published (in print/issue) - 2012 |
Keywords
- Plasma
- ion impingement
- magnetron sputtering
- thin films growth
Manuel Macias-Montero, F. J. Garcia-Garcia, R. Álvarez, J. Gil-Rostra, J. C. González, J. Cotrino, A. R. Gonzalez-Elipe, A. Palmero
Research output: Contribution to journal › Article › peer-review
Original language | English |
---|---|
Pages (from-to) | 054312 |
Journal | Journal of Applied Physics |
Volume | 111 |
Issue number | 5 |
DOIs | |
Publication status | Published (in print/issue) - 2012 |