Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width

MdA Rahman, PD Maguire, SS Roy, R McCann, JAD McLaughlin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Original language	English
Title of host publication	Unknown Host Publication
Publisher	Unknown Publisher
Number of pages	0
Publication status	Published (in print/issue) - 2009
Event	19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG) - Belfast, UK Duration: 1 Jan 2009 → …

Conference	19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG)
Period	1/01/09 → …

Cite this

@inproceedings{60171efd4e1343ee9f53f77d41eb67ad,

title = "Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width",

author = "MdA Rahman and PD Maguire and SS Roy and R McCann and JAD McLaughlin",

year = "2009",

language = "English",

booktitle = "Unknown Host Publication",

publisher = "Unknown Publisher",

note = "19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG) ; Conference date: 01-01-2009",

}

TY - GEN

T1 - Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width

AU - Rahman, MdA

AU - Maguire, PD

AU - Roy, SS

AU - McCann, R

AU - McLaughlin, JAD

PY - 2009

Y1 - 2009

M3 - Conference contribution

BT - Unknown Host Publication

PB - Unknown Publisher

T2 - 19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG)

Y2 - 1 January 2009

ER -