Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width

MdA Rahman, PD Maguire, SS Roy, R McCann, JAD McLaughlin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

LanguageEnglish
Title of host publicationUnknown Host Publication
Number of pages0
Publication statusPublished - 2009
Event19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG) - Belfast, UK
Duration: 1 Jan 2009 → …

Conference

Conference19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG)
Period1/01/09 → …

Cite this

@inproceedings{60171efd4e1343ee9f53f77d41eb67ad,
title = "Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width",
author = "MdA Rahman and PD Maguire and SS Roy and R McCann and JAD McLaughlin",
year = "2009",
language = "English",
booktitle = "Unknown Host Publication",

}

Rahman, M, Maguire, PD, Roy, SS, McCann, R & McLaughlin, JAD 2009, Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width. in Unknown Host Publication. 19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG), 1/01/09.

Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width. / Rahman, MdA; Maguire, PD; Roy, SS; McCann, R; McLaughlin, JAD.

Unknown Host Publication. 2009.

Research output: Chapter in Book/Report/Conference proceedingConference contribution

TY - GEN

T1 - Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width

AU - Rahman, MdA

AU - Maguire, PD

AU - Roy, SS

AU - McCann, R

AU - McLaughlin, JAD

PY - 2009

Y1 - 2009

M3 - Conference contribution

BT - Unknown Host Publication

ER -