Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width

MdA Rahman, PD Maguire, SS Roy, R McCann, JAD McLaughlin

Research output: Chapter in Book/Report/Conference proceedingConference contribution

Original languageEnglish
Title of host publicationUnknown Host Publication
PublisherUnknown Publisher
Number of pages0
Publication statusPublished - 2009
Event19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG) - Belfast, UK
Duration: 1 Jan 2009 → …

Conference

Conference19th Annual Conference of the Irish Plasma and Beam Processing Group (IPBPG)
Period1/01/09 → …

Cite this

Rahman, M., Maguire, PD., Roy, SS., McCann, R., & McLaughlin, JAD. (2009). Higher sp3 content ta-C films produced by FCVA technique with optimised pulse bias width. In Unknown Host Publication Unknown Publisher.