We report the low-temperature growth of vertically aligned carbon nanotubes (CNTs) at high growth rates by a photo-thermal chemical vapour deposition (PTCVD) technique using a Ti/Fe bilayer film as the catalyst. The bulk growth temperature of the substrate is as low as 370 °C and the growth rate is up to 1.3 µm min − 1, at least eight times faster than the values reported by traditional thermal CVD methods. Transmission electron microscopy observations reveal that as-grown CNTs are uniformly made of highly crystalline 5–6 graphene shells with an approximately 10 nm outer diameter and a 5–6 nm inner diameter. The low-temperature rapid growth of CNTs is strongly related to the unique top-down heating mode of PTCVD and the use of a Ti/Fe bimetallic solid solution catalyst. The present study will advance the development of CNTs as interconnects in nanoelectronics, through a CMOS-compatible low-temperature deposition method suitable for back-end-of-line processes.
Shang, NG., Tan, YY., Stolojan, V., Papakonstantinou, P., & Silva, SRP. (2010). High-rate low-temperature growth of vertically aligned carbon nanotubes. Nanotechnology, 21, 505604. https://doi.org/10.1088/0957-4484/21/50/505604