Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

R Alvarez; J M García-Martín; Manuel Macias-Montero; L Gonzalez-Garcia; J C González; V Rico; J Perlich; J Cotrino; A R González-Elipe; A Palmero

doi:10.1088/0957-4484/24/4/045604

Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

R Alvarez
, J M García-Martín
, Manuel Macias-Montero
, L Gonzalez-Garcia
, J C González
, V Rico
, J Perlich
, J Cotrino
, A R González-Elipe
, A Palmero

Research output: Contribution to journal › Article › peer-review

Original language	English
Pages (from-to)	045604
Journal	Nanotechnology
Volume	24
Issue number	4
DOIs	https://doi.org/10.1088/0957-4484/24/4/045604
Publication status	Published (in print/issue) - 2013

Keywords

Plasma
porous gold
thin films
magnetron sputtering
oblique incidence

Access to Document

10.1088/0957-4484/24/4/045604

Cite this

Alvarez, R., García-Martín, J. M., Macias-Montero, M., Gonzalez-Garcia, L., González, J. C., Rico, V., Perlich, J., Cotrino, J., González-Elipe, A. R., & Palmero, A. (2013). Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures. Nanotechnology, 24(4), 045604. https://doi.org/10.1088/0957-4484/24/4/045604

@article{caac619bd8424a57b33291907b40d65f,

title = "Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures",

keywords = "Plasma, porous gold, thin films, magnetron sputtering, oblique incidence",

author = "R Alvarez and Garc{\'i}a-Mart{\'i}n, \{J M\} and Manuel Macias-Montero and L Gonzalez-Garcia and Gonz{\'a}lez, \{J C\} and V Rico and J Perlich and J Cotrino and Gonz{\'a}lez-Elipe, \{A R\} and A Palmero",

year = "2013",

doi = "10.1088/0957-4484/24/4/045604",

language = "English",

volume = "24",

pages = "045604",

journal = "Nanotechnology",

issn = "1361-6528",

publisher = "Institute of Physics",

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Alvarez, R, García-Martín, JM, Macias-Montero, M, Gonzalez-Garcia, L, González, JC, Rico, V, Perlich, J, Cotrino, J, González-Elipe, AR & Palmero, A 2013, 'Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures', Nanotechnology, vol. 24, no. 4, pp. 045604. https://doi.org/10.1088/0957-4484/24/4/045604

TY - JOUR

T1 - Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

AU - Alvarez, R

AU - García-Martín, J M

AU - Macias-Montero, Manuel

AU - Gonzalez-Garcia, L

AU - González, J C

AU - Rico, V

AU - Perlich, J

AU - Cotrino, J

AU - González-Elipe, A R

AU - Palmero, A

PY - 2013

Y1 - 2013

KW - Plasma

KW - porous gold

KW - thin films

KW - magnetron sputtering

KW - oblique incidence

U2 - 10.1088/0957-4484/24/4/045604

DO - 10.1088/0957-4484/24/4/045604

M3 - Article

SN - 1361-6528

VL - 24

SP - 045604

JO - Nanotechnology

JF - Nanotechnology

IS - 4

ER -