Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

R Alvarez, J M García-Martín, Manuel Macias-Montero, L Gonzalez-Garcia, J C González, V Rico, J Perlich, J Cotrino, A R González-Elipe, A Palmero

    Research output: Contribution to journalArticle

    48 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)045604
    JournalNanotechnology
    Volume24
    Issue number4
    DOIs
    Publication statusPublished - 2013

    Keywords

    • Plasma
    • porous gold
    • thin films
    • magnetron sputtering
    • oblique incidence

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