Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

R Alvarez, J M García-Martín, Manuel Macias-Montero, L Gonzalez-Garcia, J C González, V Rico, J Perlich, J Cotrino, A R González-Elipe, A Palmero

    Research output: Contribution to journalArticle

    38 Citations (Scopus)
    LanguageEnglish
    Pages045604
    JournalNanotechnology
    Volume24
    Issue number4
    DOIs
    Publication statusPublished - 2013

    Keywords

    • Plasma
    • porous gold
    • thin films
    • magnetron sputtering
    • oblique incidence

    Cite this

    Alvarez, R., García-Martín, J. M., Macias-Montero, M., Gonzalez-Garcia, L., González, J. C., Rico, V., ... Palmero, A. (2013). Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures. Nanotechnology, 24(4), 045604. https://doi.org/10.1088/0957-4484/24/4/045604
    Alvarez, R ; García-Martín, J M ; Macias-Montero, Manuel ; Gonzalez-Garcia, L ; González, J C ; Rico, V ; Perlich, J ; Cotrino, J ; González-Elipe, A R ; Palmero, A. / Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures. In: Nanotechnology. 2013 ; Vol. 24, No. 4. pp. 045604.
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    keywords = "Plasma, porous gold, thin films, magnetron sputtering, oblique incidence",
    author = "R Alvarez and Garc{\'i}a-Mart{\'i}n, {J M} and Manuel Macias-Montero and L Gonzalez-Garcia and Gonz{\'a}lez, {J C} and V Rico and J Perlich and J Cotrino and Gonz{\'a}lez-Elipe, {A R} and A Palmero",
    year = "2013",
    doi = "10.1088/0957-4484/24/4/045604",
    language = "English",
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    Alvarez, R, García-Martín, JM, Macias-Montero, M, Gonzalez-Garcia, L, González, JC, Rico, V, Perlich, J, Cotrino, J, González-Elipe, AR & Palmero, A 2013, 'Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures', Nanotechnology, vol. 24, no. 4, pp. 045604. https://doi.org/10.1088/0957-4484/24/4/045604

    Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures. / Alvarez, R; García-Martín, J M; Macias-Montero, Manuel; Gonzalez-Garcia, L; González, J C; Rico, V; Perlich, J; Cotrino, J; González-Elipe, A R; Palmero, A.

    In: Nanotechnology, Vol. 24, No. 4, 2013, p. 045604.

    Research output: Contribution to journalArticle

    TY - JOUR

    T1 - Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

    AU - Alvarez, R

    AU - García-Martín, J M

    AU - Macias-Montero, Manuel

    AU - Gonzalez-Garcia, L

    AU - González, J C

    AU - Rico, V

    AU - Perlich, J

    AU - Cotrino, J

    AU - González-Elipe, A R

    AU - Palmero, A

    PY - 2013

    Y1 - 2013

    KW - Plasma

    KW - porous gold

    KW - thin films

    KW - magnetron sputtering

    KW - oblique incidence

    U2 - 10.1088/0957-4484/24/4/045604

    DO - 10.1088/0957-4484/24/4/045604

    M3 - Article

    VL - 24

    SP - 045604

    JO - Nanotechnology

    T2 - Nanotechnology

    JF - Nanotechnology

    SN - 0957-4484

    IS - 4

    ER -