Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures

R Alvarez, J M García-Martín, Manuel Macias-Montero, L Gonzalez-Garcia, J C González, V Rico, J Perlich, J Cotrino, A R González-Elipe, A Palmero

    Research output: Contribution to journalArticle

    48 Citations (Scopus)
    Original languageEnglish
    Pages (from-to)045604
    JournalNanotechnology
    Volume24
    Issue number4
    DOIs
    Publication statusPublished - 2013

    Keywords

    • Plasma
    • porous gold
    • thin films
    • magnetron sputtering
    • oblique incidence

    Cite this

    Alvarez, R., García-Martín, J. M., Macias-Montero, M., Gonzalez-Garcia, L., González, J. C., Rico, V., Perlich, J., Cotrino, J., González-Elipe, A. R., & Palmero, A. (2013). Growth regimes of porous gold thin films deposited by magnetron sputtering at oblique incidence: from compact to columnar microstructures. Nanotechnology, 24(4), 045604. https://doi.org/10.1088/0957-4484/24/4/045604