Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing

AC Bose, Y Shimizu, D Mariotti, T Sasaki, K Terashima, N Koshizaki

Research output: Contribution to journalArticle

48 Citations (Scopus)

Abstract

Nanoparticles of crystalline molybdenum oxide were prepared by changing the flow rate of plasma gas (2% oxygen balanced by Ar) using an atmospheric-pressure microplasma technique. The morphology and crystalline structure of the nanoparticles were characterized by field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM). The FESEM results revealed that the shape of the deposited nanoparticles depended on the plasma gas flow rate. The TEM results supported the FESEM observations. The transmission electron diffraction (TED) pattern revealed that the obtained nanoparticles changed from MoO2 to MoO3 with the flow-rate increase, and correspondingly the nanoparticle size drastically decreased. A process mechanism is proposed from the observations of optical emission spectroscopy (OES) during the process and consumed wire surface analysis from x-ray photoelectron spectroscopy (XPS) and FESEM studies.
LanguageEnglish
Pages5976-5982
JournalNanotechnology
Volume17
Issue number24
DOIs
Publication statusPublished - 22 Nov 2006

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Molybdenum oxide
Atmospheric pressure
Field emission
Flow rate
Nanoparticles
Plasma Gases
Processing
Scanning electron microscopy
Crystalline materials
Transmission electron microscopy
Plasmas
Optical emission spectroscopy
Surface analysis
Photoelectron spectroscopy
Electron diffraction
Diffraction patterns
Flow of gases
Wire
Oxygen
X rays

Cite this

Bose, AC ; Shimizu, Y ; Mariotti, D ; Sasaki, T ; Terashima, K ; Koshizaki, N. / Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing. In: Nanotechnology. 2006 ; Vol. 17, No. 24. pp. 5976-5982.
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Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing. / Bose, AC; Shimizu, Y; Mariotti, D; Sasaki, T; Terashima, K; Koshizaki, N.

In: Nanotechnology, Vol. 17, No. 24, 22.11.2006, p. 5976-5982.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Flow rate effect on the structure and morphology of molybdenum oxide nanoparticles deposited by atmospheric-pressure microplasma processing

AU - Bose, AC

AU - Shimizu, Y

AU - Mariotti, D

AU - Sasaki, T

AU - Terashima, K

AU - Koshizaki, N

PY - 2006/11/22

Y1 - 2006/11/22

N2 - Nanoparticles of crystalline molybdenum oxide were prepared by changing the flow rate of plasma gas (2% oxygen balanced by Ar) using an atmospheric-pressure microplasma technique. The morphology and crystalline structure of the nanoparticles were characterized by field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM). The FESEM results revealed that the shape of the deposited nanoparticles depended on the plasma gas flow rate. The TEM results supported the FESEM observations. The transmission electron diffraction (TED) pattern revealed that the obtained nanoparticles changed from MoO2 to MoO3 with the flow-rate increase, and correspondingly the nanoparticle size drastically decreased. A process mechanism is proposed from the observations of optical emission spectroscopy (OES) during the process and consumed wire surface analysis from x-ray photoelectron spectroscopy (XPS) and FESEM studies.

AB - Nanoparticles of crystalline molybdenum oxide were prepared by changing the flow rate of plasma gas (2% oxygen balanced by Ar) using an atmospheric-pressure microplasma technique. The morphology and crystalline structure of the nanoparticles were characterized by field emission scanning electron microscopy (FESEM) and transmission electron microscopy (TEM). The FESEM results revealed that the shape of the deposited nanoparticles depended on the plasma gas flow rate. The TEM results supported the FESEM observations. The transmission electron diffraction (TED) pattern revealed that the obtained nanoparticles changed from MoO2 to MoO3 with the flow-rate increase, and correspondingly the nanoparticle size drastically decreased. A process mechanism is proposed from the observations of optical emission spectroscopy (OES) during the process and consumed wire surface analysis from x-ray photoelectron spectroscopy (XPS) and FESEM studies.

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DO - 10.1088/0957-4484/17/24/012

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SP - 5976

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JO - Nanotechnology

T2 - Nanotechnology

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SN - 0957-4484

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