Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk

Nikhil Bhalla; Sheng-shian Li; Danny Wen-yaw Chung

doi:10.1109/SMICND.2011.6095815

Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk

Nikhil Bhalla, Sheng-shian Li, Danny Wen-yaw Chung

School of Engineering

Research output: Contribution to conference › Paper › peer-review

8 Citations (Scopus)

Abstract

The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

Original language	English
Pages	353-356
DOIs	https://doi.org/10.1109/SMICND.2011.6095815
Publication status	Published (in print/issue) - Oct 2011
Event	2011 International Semiconductor Conference (CAS 2011) - Sinaia, Romania Duration: 17 Oct 2011 → 19 Oct 2011

Conference

Conference	2011 International Semiconductor Conference (CAS 2011)
Period	17/10/11 → 19/10/11

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10.1109/SMICND.2011.6095815

http://ieeexplore.ieee.org/document/6095815/

Cite this

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title = "Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk",

abstract = "The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.",

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N2 - The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

AB - The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

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T2 - 2011 International Semiconductor Conference (CAS 2011)

Y2 - 17 October 2011 through 19 October 2011

ER -

Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk

Abstract

Conference

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