Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk

Nikhil Bhalla, Sheng-shian Li, Danny Wen-yaw Chung

Research output: Contribution to conferencePaper

5 Citations (Scopus)

Abstract

The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

Conference

Conference2011 International Semiconductor Conference (CAS 2011)
Period17/10/1119/10/11

Fingerprint

Crosstalk
Accelerometers
MEMS
Finite element method

Cite this

Bhalla, N., Li, S., & Chung, D. W. (2011). Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk. 353-356. Paper presented at 2011 International Semiconductor Conference (CAS 2011), . https://doi.org/10.1109/SMICND.2011.6095815
Bhalla, Nikhil ; Li, Sheng-shian ; Chung, Danny Wen-yaw. / Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk. Paper presented at 2011 International Semiconductor Conference (CAS 2011), .
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abstract = "The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.",
author = "Nikhil Bhalla and Sheng-shian Li and Chung, {Danny Wen-yaw}",
year = "2011",
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doi = "10.1109/SMICND.2011.6095815",
language = "English",
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note = "2011 International Semiconductor Conference (CAS 2011) ; Conference date: 17-10-2011 Through 19-10-2011",

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Bhalla, N, Li, S & Chung, DW 2011, 'Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk' Paper presented at 2011 International Semiconductor Conference (CAS 2011), 17/10/11 - 19/10/11, pp. 353-356. https://doi.org/10.1109/SMICND.2011.6095815

Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk. / Bhalla, Nikhil; Li, Sheng-shian; Chung, Danny Wen-yaw.

2011. 353-356 Paper presented at 2011 International Semiconductor Conference (CAS 2011), .

Research output: Contribution to conferencePaper

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N2 - The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

AB - The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.

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Bhalla N, Li S, Chung DW. Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk. 2011. Paper presented at 2011 International Semiconductor Conference (CAS 2011), . https://doi.org/10.1109/SMICND.2011.6095815