Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk

Nikhil Bhalla, Sheng-shian Li, Danny Wen-yaw Chung

Research output: Contribution to conferencePaper

6 Citations (Scopus)

Abstract

The investigation in this paper involves Final Element Analysis (FEA) of piezoresistive accelerometer designs. Three different configurations of MEMS based accelerometer has been made and analysed using COMSOL Multiphysics. The designs presented in this paper consist of a square shaped proof mass with flexures supporting it. Different position and varied number of supporting flexures attached to the proof mass makes each configuration distinct. The piezoresistors are placed near the proof mass and frame ends on the flexure. In all three configurations the piezoresistors are placed and connected so as to minimize crosstalk.
Original languageEnglish
Pages353-356
DOIs
Publication statusPublished - Oct 2011
Event2011 International Semiconductor Conference (CAS 2011) - Sinaia, Romania
Duration: 17 Oct 201119 Oct 2011

Conference

Conference2011 International Semiconductor Conference (CAS 2011)
Period17/10/1119/10/11

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Bhalla, N., Li, S., & Chung, D. W. (2011). Finite element analysis of MEMS square piezoresistive accelerometer designs with low crosstalk. 353-356. Paper presented at 2011 International Semiconductor Conference (CAS 2011), . https://doi.org/10.1109/SMICND.2011.6095815