Fabrication and characterization of a microelectromechanical tunable capacitor

Ching Liang Dai, Shih Chieh Lin, Ming Wei Chang

Research output: Contribution to journalArticlepeer-review

7 Citations (Scopus)


A micromechanical tunable capacitor fabricated using the commercial 0.35 μm complementary metal oxide semiconductor (CMOS) process and the post-process has been investigated in this study. The structure of the tunable capacitor consists of a membrane, supported beams, driving and sensing electrodes. The membrane is sustained by the supported beams. The tunable capacitor requires only one wet etching post-process to release the suspended structures. The post-process has the advantages of easy execution and low cost. The tunable capacitor contains a driving part and a sensing part. The sensing part generates a change in capacitance when applying a driving voltage to the driving part. Experimental results show that the tunable capacitor has a capacitance of 1.38 pF, a tuning range of 85% and a Q-factor of 40 at 100 MHz.

Original languageEnglish
Pages (from-to)1257-1262
Number of pages6
JournalMicroelectronics Journal
Issue number12
Publication statusPublished (in print/issue) - 1 Dec 2007


  • CMOS
  • Microactuator
  • Micromechanical tunable capacitor


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