Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling

Sam Fishlock, Sean O'Shea, John McBride, Harold Chong, Suan Hui Pu

Research output: Contribution to journalArticle

3 Citations (Scopus)

Abstract

The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.
LanguageEnglish
Article number095015
Pages1-8
Number of pages8
JournalJournal of Micromechanics and Microengineering
Volume27
Issue number9
Early online date22 Aug 2017
DOIs
Publication statusPublished - 30 Sep 2017

Fingerprint

Graphite
MEMS
Buckling
Resonators
Fabrication
Plasma enhanced chemical vapor deposition
Silicon wafers
Graphene
Electrostatics
Vacuum
Lasers
Substrates

Cite this

@article{f1f7e848bd42468ead3ad4175ee4e9fe,
title = "Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling",
abstract = "The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.",
author = "Sam Fishlock and Sean O'Shea and John McBride and Harold Chong and {Hui Pu}, Suan",
note = "Evidence Attached - uploaded to Soton repository in deadline",
year = "2017",
month = "9",
day = "30",
doi = "10.1088/1361-6439/aa7ebb",
language = "English",
volume = "27",
pages = "1--8",
journal = "Journal of Micromechanics and Microengineering",
issn = "0960-1317",
number = "9",

}

Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling. / Fishlock, Sam; O'Shea, Sean; McBride, John; Chong, Harold; Hui Pu, Suan.

In: Journal of Micromechanics and Microengineering, Vol. 27, No. 9, 095015, 30.09.2017, p. 1-8.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling

AU - Fishlock, Sam

AU - O'Shea, Sean

AU - McBride, John

AU - Chong, Harold

AU - Hui Pu, Suan

N1 - Evidence Attached - uploaded to Soton repository in deadline

PY - 2017/9/30

Y1 - 2017/9/30

N2 - The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.

AB - The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.

U2 - 10.1088/1361-6439/aa7ebb

DO - 10.1088/1361-6439/aa7ebb

M3 - Article

VL - 27

SP - 1

EP - 8

JO - Journal of Micromechanics and Microengineering

T2 - Journal of Micromechanics and Microengineering

JF - Journal of Micromechanics and Microengineering

SN - 0960-1317

IS - 9

M1 - 095015

ER -