Abstract
| Language | English |
|---|---|
| Article number | 095015 |
| Pages | 1-8 |
| Number of pages | 8 |
| Journal | Journal of Micromechanics and Microengineering |
| Volume | 27 |
| Issue number | 9 |
| Early online date | 22 Aug 2017 |
| DOIs | |
| Publication status | Published - 30 Sep 2017 |
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Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling. / Fishlock, Sam; O'Shea, Sean; McBride, John; Chong, Harold; Hui Pu, Suan.
In: Journal of Micromechanics and Microengineering, Vol. 27, No. 9, 095015, 30.09.2017, p. 1-8.Research output: Contribution to journal › Article
TY - JOUR
T1 - Fabrication and characterisation of nanocrystalline graphite MEMS resonators using a geometric design to control buckling
AU - Fishlock, Sam
AU - O'Shea, Sean
AU - McBride, John
AU - Chong, Harold
AU - Hui Pu, Suan
N1 - Evidence Attached - uploaded to Soton repository in deadline
PY - 2017/9/30
Y1 - 2017/9/30
N2 - The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.
AB - The simulation, fabrication and characterisation of nanographite MEMS resonators is reported in this paper. The deposition of nanographite is achieved using plasma-enhanced chemical vapour deposition directly onto numerous substrates such as commercial silicon wafers. As a result, many of the reliability issues of devices based on transferred graphene are avoided. The fabrication of the resonators is presented along with a simple undercutting method to overcome buckling, by changing the effective stress of the structure from ~436 MPa compressive, to ~13 MPa tensile. The characterisation of the resonators using electrostatic actuation and laser Doppler vibrometry is reported, demonstrating resonator frequencies from 5–640 kHz and quality factor above 1819 in vacuum obtained.
U2 - 10.1088/1361-6439/aa7ebb
DO - 10.1088/1361-6439/aa7ebb
M3 - Article
VL - 27
SP - 1
EP - 8
JO - Journal of Micromechanics and Microengineering
T2 - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
SN - 0960-1317
IS - 9
M1 - 095015
ER -