Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

S. S. Roy, R. McCann, P. Papakonstantinou, G. A. Abbas, J. A. McLaughlin

    Research output: Chapter in Book/Report/Conference proceedingConference contributionpeer-review

    Abstract

    The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

    Original languageEnglish
    Title of host publication2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
    Pages797-799
    Number of pages3
    Publication statusPublished - 2006
    Event2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States
    Duration: 7 May 200611 May 2006

    Publication series

    Name2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
    Volume1

    Conference

    Conference2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
    CountryUnited States
    CityBoston, MA
    Period7/05/0611/05/06

    Keywords

    • Electronic structure
    • Raman spectroscopy
    • Surface defect
    • Tetrahedral amorphous carbon
    • Ultrathin film

    Fingerprint

    Dive into the research topics of 'Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy'. Together they form a unique fingerprint.

    Cite this