Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

S. S. Roy; R. McCann; P. Papakonstantinou; G. A. Abbas; J. A. McLaughlin

Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

S. S. Roy, R. McCann, P. Papakonstantinou, G. A. Abbas, J. A. McLaughlin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

Original language	English
Title of host publication	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Pages	797-799
Number of pages	3
Publication status	Published (in print/issue) - 2006
Event	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States Duration: 7 May 2006 → 11 May 2006

Publication series

Name	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Volume	1

Conference

Conference	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Country/Territory	United States
City	Boston, MA
Period	7/05/06 → 11/05/06

Bibliographical note

Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.

Keywords

Electronic structure
Raman spectroscopy
Surface defect
Tetrahedral amorphous carbon
Ultrathin film

Cite this

Roy, S. S., McCann, R., Papakonstantinou, P., Abbas, G. A., & McLaughlin, J. A. (2006). Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings (pp. 797-799). (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings; Vol. 1).

Roy, S. S. ; McCann, R. ; Papakonstantinou, P. et al. / Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006. pp. 797-799 (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings).

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title = "Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy",

abstract = "The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.",

keywords = "Electronic structure, Raman spectroscopy, Surface defect, Tetrahedral amorphous carbon, Ultrathin film",

author = "Roy, {S. S.} and R. McCann and P. Papakonstantinou and Abbas, {G. A.} and McLaughlin, {J. A.}",

note = "Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings ; Conference date: 07-05-2006 Through 11-05-2006",

year = "2006",

language = "English",

isbn = "0976798565",

series = "2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings",

pages = "797--799",

booktitle = "2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings",

}

Roy, SS, McCann, R, Papakonstantinou, P, Abbas, GA & McLaughlin, JA 2006, Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. in 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings, vol. 1, pp. 797-799, 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings, Boston, MA, United States, 7/05/06.

Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. / Roy, S. S.; McCann, R.; Papakonstantinou, P. et al.

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006. p. 797-799 (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

TY - GEN

T1 - Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

AU - Roy, S. S.

AU - McCann, R.

AU - Papakonstantinou, P.

AU - Abbas, G. A.

AU - McLaughlin, J. A.

PY - 2006

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N2 - The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

AB - The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

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KW - Ultrathin film

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Roy SS, McCann R, Papakonstantinou P, Abbas GA, McLaughlin JA. Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006. p. 797-799. (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings).

Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

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