The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.
|Title of host publication||2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings|
|Number of pages||3|
|Publication status||Published (in print/issue) - 2006|
|Event||2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States|
Duration: 7 May 2006 → 11 May 2006
|Name||2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings|
|Conference||2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings|
|Period||7/05/06 → 11/05/06|
Copyright 2008 Elsevier B.V., All rights reserved.
- Electronic structure
- Raman spectroscopy
- Surface defect
- Tetrahedral amorphous carbon
- Ultrathin film