Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

S. S. Roy; R. McCann; P. Papakonstantinou; G. A. Abbas; J. A. McLaughlin

Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

S. S. Roy, R. McCann, P. Papakonstantinou, G. A. Abbas, J. A. McLaughlin

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

Abstract

The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

Original language	English
Title of host publication	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Pages	797-799
Number of pages	3
Publication status	Published - 2006
Event	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings - Boston, MA, United States Duration: 7 May 2006 → 11 May 2006

Publication series

Name	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Volume	1

Conference

Conference	2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings
Country	United States
City	Boston, MA
Period	7/05/06 → 11/05/06

Keywords

Electronic structure
Raman spectroscopy
Surface defect
Tetrahedral amorphous carbon
Ultrathin film

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Roy, S. S., McCann, R., Papakonstantinou, P., Abbas, G. A., & McLaughlin, J. A. (2006). Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings (pp. 797-799). (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings; Vol. 1).

Roy, S. S. ; McCann, R. ; Papakonstantinou, P. ; Abbas, G. A. ; McLaughlin, J. A. / Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006. pp. 797-799 (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings).

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title = "Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy",

abstract = "The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.",

keywords = "Electronic structure, Raman spectroscopy, Surface defect, Tetrahedral amorphous carbon, Ultrathin film",

author = "Roy, {S. S.} and R. McCann and P. Papakonstantinou and Abbas, {G. A.} and McLaughlin, {J. A.}",

note = "Copyright: Copyright 2008 Elsevier B.V., All rights reserved.; 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings ; Conference date: 07-05-2006 Through 11-05-2006",

year = "2006",

language = "English",

isbn = "0976798565",

series = "2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings",

pages = "797--799",

booktitle = "2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings",

}

Roy, SS, McCann, R, Papakonstantinou, P, Abbas, GA & McLaughlin, JA 2006, Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. in 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings, vol. 1, pp. 797-799, 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings, Boston, MA, United States, 7/05/06.

Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. / Roy, S. S.; McCann, R.; Papakonstantinou, P.; Abbas, G. A.; McLaughlin, J. A.

2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006. p. 797-799 (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings; Vol. 1).

Research output: Chapter in Book/Report/Conference proceeding › Conference contribution › peer-review

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T1 - Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy

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AU - McCann, R.

AU - Papakonstantinou, P.

AU - Abbas, G. A.

AU - McLaughlin, J. A.

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N2 - The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

AB - The tetrahedral amorphous carbon (ta-C) films with thickness 1-10 nm were obtained by filtered cathodic vacuum arc deposition and investigated by near edge X-ray absorption fine structure (NEXAFS) and Raman spectroscopies. The C K (carbon K) edge NEXAFS spectra clearly revealed that the C=C bonds are more or less same for the film above 2 nm thickness. The evidence of surface defect was clearly visible for films with 1 nm thickness. The C K edge NEXAFS analysis further showed that the content of the surface defect (mainly C-H bonds) decreased with the increase thickness in the alms. The intensity of the Raman G peak increased with the increase of thickness. The X ray reflectivity measurements revealed the increased of film density with thickness.

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Roy SS, McCann R, Papakonstantinou P, Abbas GA, McLaughlin JA. Evidence of surface defects in ultrathin tetrahedral amorphous carbon films probed by x-ray absorption spectroscopy. In 2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings. 2006. p. 797-799. (2006 NSTI Nanotechnology Conference and Trade Show - NSTI Nanotech 2006 Technical Proceedings).