Epitaxial BiFeO3 nanostructures fabricated by differential etching of BiFeO3 films

Florian Johann, Alessio Morelli, Ionela Vrejoiu

Research output: Contribution to journalArticle

16 Citations (Scopus)

Abstract

We report on differential etching behavior of the different orientations of the polarization in BiFeO3 (BFO), similar to other ferroelectrics, such as LiNbO3. We show how this effect can be used to fabricate epitaxial BiFeO3 nanostructures. By means of piezoresponse force microscopy (PFM) domains of arbitrary shape and size can be poled in an epitaxial BiFeO3 film, which are then reproduced in the film morphology by differential etching. Structures with a lateral size smaller than 200 nm were fabricated and very good retention properties as well as a highly increased piezoelectric response were detected by PFM.

LanguageEnglish
Article number082904
JournalApplied Physics Letters
Volume99
Issue number8
DOIs
Publication statusPublished - 22 Aug 2011

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@article{8d6259e3eb7046f8b0202faeb39c2635,
title = "Epitaxial BiFeO3 nanostructures fabricated by differential etching of BiFeO3 films",
abstract = "We report on differential etching behavior of the different orientations of the polarization in BiFeO3 (BFO), similar to other ferroelectrics, such as LiNbO3. We show how this effect can be used to fabricate epitaxial BiFeO3 nanostructures. By means of piezoresponse force microscopy (PFM) domains of arbitrary shape and size can be poled in an epitaxial BiFeO3 film, which are then reproduced in the film morphology by differential etching. Structures with a lateral size smaller than 200 nm were fabricated and very good retention properties as well as a highly increased piezoelectric response were detected by PFM.",
author = "Florian Johann and Alessio Morelli and Ionela Vrejoiu",
year = "2011",
month = "8",
day = "22",
doi = "10.1063/1.3630027",
language = "English",
volume = "99",
journal = "Applied Physics Letters",
issn = "0003-6951",
number = "8",

}

Epitaxial BiFeO3 nanostructures fabricated by differential etching of BiFeO3 films. / Johann, Florian; Morelli, Alessio; Vrejoiu, Ionela.

In: Applied Physics Letters, Vol. 99, No. 8, 082904, 22.08.2011.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Epitaxial BiFeO3 nanostructures fabricated by differential etching of BiFeO3 films

AU - Johann, Florian

AU - Morelli, Alessio

AU - Vrejoiu, Ionela

PY - 2011/8/22

Y1 - 2011/8/22

N2 - We report on differential etching behavior of the different orientations of the polarization in BiFeO3 (BFO), similar to other ferroelectrics, such as LiNbO3. We show how this effect can be used to fabricate epitaxial BiFeO3 nanostructures. By means of piezoresponse force microscopy (PFM) domains of arbitrary shape and size can be poled in an epitaxial BiFeO3 film, which are then reproduced in the film morphology by differential etching. Structures with a lateral size smaller than 200 nm were fabricated and very good retention properties as well as a highly increased piezoelectric response were detected by PFM.

AB - We report on differential etching behavior of the different orientations of the polarization in BiFeO3 (BFO), similar to other ferroelectrics, such as LiNbO3. We show how this effect can be used to fabricate epitaxial BiFeO3 nanostructures. By means of piezoresponse force microscopy (PFM) domains of arbitrary shape and size can be poled in an epitaxial BiFeO3 film, which are then reproduced in the film morphology by differential etching. Structures with a lateral size smaller than 200 nm were fabricated and very good retention properties as well as a highly increased piezoelectric response were detected by PFM.

UR - http://www.scopus.com/inward/record.url?scp=80052422230&partnerID=8YFLogxK

U2 - 10.1063/1.3630027

DO - 10.1063/1.3630027

M3 - Article

VL - 99

JO - Applied Physics Letters

T2 - Applied Physics Letters

JF - Applied Physics Letters

SN - 0003-6951

IS - 8

M1 - 082904

ER -