Abstract
X-ray absorption near-edge structure (XANES) and valence- band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V-b) using a C2H2 vapour precursor in an Ar+ atmosphere. The increase of V-b is found to increase and decrease the contents of sp(3)- and sp(2)- bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp3-bonded carbon atoms in the structure of the DLC films.
Original language | English |
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Pages (from-to) | 176204 |
Journal | Journal of Physics: Condensed Matter |
Volume | 19 |
Issue number | 17 |
DOIs | |
Publication status | Published (in print/issue) - 28 May 2007 |