Enhancement of sp(3)-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy

SC Ray, CW Pao, HM Tsai, JW Chiou, WF Pong, MH Tsai, TIT Okpalugo, P Papakonstantinou, TW Pi

Research output: Contribution to journalArticle

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Abstract

X-ray absorption near-edge structure (XANES) and valence- band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V-b) using a C2H2 vapour precursor in an Ar+ atmosphere. The increase of V-b is found to increase and decrease the contents of sp(3)- and sp(2)- bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp3-bonded carbon atoms in the structure of the DLC films.
LanguageEnglish
Pages176204
JournalJournal of Physics: Condensed Matter
Volume19
Issue number17
DOIs
Publication statusPublished - 28 May 2007

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Diamond
Carbon films
Photoelectron spectroscopy
Bias voltage
Absorption spectroscopy
x ray absorption
x ray spectroscopy
Diamonds
absorption spectroscopy
photoelectric emission
Carbon
diamonds
X rays
Thin films
Atoms
Diamond like carbon films
augmentation
carbon
X ray absorption
electric potential

Cite this

@article{b5caa77f5aed4a5aa3aea9786596be75,
title = "Enhancement of sp(3)-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy",
abstract = "X-ray absorption near-edge structure (XANES) and valence- band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V-b) using a C2H2 vapour precursor in an Ar+ atmosphere. The increase of V-b is found to increase and decrease the contents of sp(3)- and sp(2)- bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp3-bonded carbon atoms in the structure of the DLC films.",
author = "SC Ray and CW Pao and HM Tsai and JW Chiou and WF Pong and MH Tsai and TIT Okpalugo and P Papakonstantinou and TW Pi",
year = "2007",
month = "5",
day = "28",
doi = "10.1088/0953-8984/19/17/176204",
language = "English",
volume = "19",
pages = "176204",
journal = "Journal of Physics: Condensed Matter",
issn = "0953-8984",
number = "17",

}

Enhancement of sp(3)-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy. / Ray, SC; Pao, CW; Tsai, HM; Chiou, JW; Pong, WF; Tsai, MH; Okpalugo, TIT; Papakonstantinou, P; Pi, TW.

In: Journal of Physics: Condensed Matter, Vol. 19, No. 17, 28.05.2007, p. 176204.

Research output: Contribution to journalArticle

TY - JOUR

T1 - Enhancement of sp(3)-bonding in high-bias-voltage grown diamond-like carbon thin films studied by x-ray absorption and photoemission spectroscopy

AU - Ray, SC

AU - Pao, CW

AU - Tsai, HM

AU - Chiou, JW

AU - Pong, WF

AU - Tsai, MH

AU - Okpalugo, TIT

AU - Papakonstantinou, P

AU - Pi, TW

PY - 2007/5/28

Y1 - 2007/5/28

N2 - X-ray absorption near-edge structure (XANES) and valence- band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V-b) using a C2H2 vapour precursor in an Ar+ atmosphere. The increase of V-b is found to increase and decrease the contents of sp(3)- and sp(2)- bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp3-bonded carbon atoms in the structure of the DLC films.

AB - X-ray absorption near-edge structure (XANES) and valence- band photoemission spectroscopy (VB-PES) were used to elucidate the electronic and mechanical properties of diamond-like carbon (DLC) thin films deposited by the plasma-enhanced chemical vapour deposition method at various bias voltages (V-b) using a C2H2 vapour precursor in an Ar+ atmosphere. The increase of V-b is found to increase and decrease the contents of sp(3)- and sp(2)- bonded carbon atoms, respectively, i.e. the films become more diamond-like. The Young's modulus measurements show increases with the increase of the presence of sp3-bonded carbon atoms in the structure of the DLC films.

U2 - 10.1088/0953-8984/19/17/176204

DO - 10.1088/0953-8984/19/17/176204

M3 - Article

VL - 19

SP - 176204

JO - Journal of Physics: Condensed Matter

T2 - Journal of Physics: Condensed Matter

JF - Journal of Physics: Condensed Matter

SN - 0953-8984

IS - 17

ER -